Taiwan Semiconductor Manufacturing Comp. Ltd.

Richard Chen

Wen-Kung Cheng

Chen-Peng Fan

Ming-Hsien Chen

Yao Hsiang Liang

Chao-Keng Li

Jung-Chen Yang

Tsai-Yi Chen

Wen-Yu Ho

Yong-Sin Chang

Te-Chin Chiu

Labo Chang

A semiconductor structure includes a transistor formed over a substrate. The transistor includes a transistor gate and at least one source/drain region. The semiconductor structure includes a pre-determined region coupled to the transistor. The semiconductor structure further includes a resist protection oxide (RPO) layer formed over the pre-determined region, wherein the RPO layer has a level of nitrogen of about 0.35 atomic % or less.

Image sensor having an RPO layer containing nitrogen

A method of detecting a crack in a body of a quartz window provides for having a source of a laser beam and a light receiver; applying a reflective coating onto an exterior surface of the quartz window; directing the laser beam from the source into the quartz window so that, in the course of successive reflections of the beam from an exterior surface of the quartz window, the beam undergoes a plurality of predetermined strokes within the body of the quartz window thus probing the body, making the conclusion of the absence of a crack in the body of the quartz window by receiving a reflected beam by the light receiver, which is installed so as to catch the beam having unobtrusively passed through the body of the quartz window, or arriving at the conclusion of the presence of a crack in the body of the quartz window if a reflected beam is not received by the light receiver.

Real time detection of cracked quartz window

Growing community of inventors

Jhubei, Taiwan

Richard Chen