Lockheed Martin Ir Imaging Systems, Inc.

Bae Systems Information and Electronic Systems Integration Inc.

Bae Systems Information and Electronics Systems Integration Inc.

Richard Blackwell

Neal R Butler

Charles McAlister Marshall

Jeannie Geneczko

Jacek Mroczkowski

Margaret Kohin

An uncooled infrared sensor can be used for a plurality of applications such as fire fighting, surveilling a border or any desired area, and limb sounding. The uncooled infrared sensor includes manually or automatically adjustable optics that receive an electromagnetic signal, focus the electromagnetic signal and provide a focused electromagnetic signal to a focal plane array. The focal plane array includes a plurality of detector devices disposed in rows and columns to form the focal plane array. Each detector device is constructed so as to have a reduced pitch and provide a maximum number of detectors within a minimum square area of the focal plane array. Each detector device detects the focused electromagnetic signal incident upon it, converts the focused electromagnetic signal into a sensed signal and outputs the sensed signal so that the focal plane array provides a plurality of sensed signals. The sensor also includes a focal plane array processor that has a plurality of cells corresponding to the plurality of detector devices. The focal plane array processor receives the plurality of sensed signals, processes the plurality of sensed signals to correct for any gain and any offset errors between the plurality of sensed signals due to any inconsistencies between any of the detector devices of the focal plane array and any inconsistencies within the cells of the focal plane array processor itself, and outputs a plurality of processed signals. The sensor also includes a display processor that receives the plurality of processed signals and converts the plurality of processed signals into a video signal suitable for display. The focal plane array processor, the display processor and a controller also provide temperature stabilization of the sensor, manual or automatic calibration of the sensor, manual or automatic gain and level control of the sensor and automatic or manual calibration of the sensor.

Uncooled infrared sensor

A process and system for a medium wave infrared (MWIR) uncooled microbolometer focal plane array (FPA). One embodiment is for a single MWIR band uncooled IR detector, wherein the design and fabrication utilizes standard silicon processing techniques reducing manufacturing costs and preserving existing manufacturing capabilities. Another embodiment is a two color uncooled microbolometer IR detector providing broadband detection.

Multi-spectral uncooled microbolometer detectors

Techniques that eliminate or otherwise reduce retroreflections associated with focal plane arrays (cooled and uncooled) and other tilted devices are disclosed. The device topology is designed so that incoming radiation is reflected outside of the incoming focusing optical cone. Planarization is used to eliminate concave geometries and angled sidewalls can be used to eliminate convex geometries, as such geometries cause retroreflection. The resultant structure is covered with reflective material (e.g., aluminum, titanium tungsten, or other standard metallization), which not only safely reflects light from the scene, but also prevents reflections from the underlying geometries of the via. Devices configured in accordance with the principles of the present invention require less tilt, thereby minimizing optical distortion.

Zero reflectance design for tilted devices

A dual-band detector that absorbs incident radiation in a first range of wavelengths and that absorbs incident radiation in a second range of wavelengths. The dual-band detector includes a semiconductor substrate and a first microbridge detector level disposed above the semiconductor substrate. The first microbridge detector level includes an active area that absorbs incident radiation in one of the first range of wavelengths and the second range of wavelengths. In one embodiment, the semiconductor substrate includes a detector that detects incident radiation in the other of the first and second range of wavelengths. In another embodiment, the dual-band microbridge detector also includes a second microbridge detector level. The second microbridge detector level also includes an active area that absorbs incident radiation in an alternative one of the first range of wavelengths and the second range or wavelengths. With this apparatus, the dual-band detector can operate in a first range of wavelengths and also in a second range of wavelengths. In addition, this apparatus can be fabricated using existing processing techniques.

Imaging system including an array of dual-band microbridge detectors

Dual-band multi-level microbridge detector

A microbridge detector is with an active area that is smaller than a pixel collection area of the microbridge detector. The microbridge detector includes a semiconductor substrate on a first level and an microbridge level disposed above the semiconductor substrate. The microbridge level includes the active area having the pixel collection area greater than a square area of the active area of the microbridge detector. In addition, downwardly extending leg portions are a continuation of the microbridge level and support the microbridge level above the semiconductor substrate so that a thermal isolation gap exists between the microbridge level and the semiconductor substrate. Further, electrically conductive paths are included within the downwardly extending leg portions and connect the active area in the microbridge level to the semiconductor substrate. With this apparatus, the microbridge detector is provided with a pixel collecting area that is larger than a fill factor of the microbridge detector and thus is provided with an enhanced optical collection sensitivity. In addition, with this apparatus, the microbridge detector device can be fabricated with a smaller active area without having to build a smaller microbridge level and thus is not limited by processing techniques.

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Andover, MA, United States of America

Richard Blackwell