Kla Tencor Corporation

Nanomechanics, Inc.

Richard Anthony

Warren C Oliver

Sudharshan Phani Pardhasaradhi

Warren Oliver

A heated or cooled sample holding stage for use in a nanoindentation measurement system is described. The geometry of the design and the selection of materials minimizes movement of a sample holder with respect to a nanoindentation tip over a wide range of temperatures. The system controls and minimizes motion of the sample holder due to the heating or cooling of the tip holder and/or the sample holder in a high temperature nanoindentation system. This is achieved by a combination of geometry, material selection and multiple sources and sinks of heat. The system is designed to control both the steady state and the transient displacement response.

Growing community of inventors

Maryville, TN, United States of America

Richard Anthony