Advanced Silicon Materials LLC

Union Carbide Corporation

Richard A Van Slooten

Ravi Prasad

Sridhar K Iya

James R Lay

Mark E Braaten

An improved fluidized bed reactor characterized by a peripheral heating zone annulus containing particles of the fluidized bed. The particles are heated in the heating zone annulus and transferred to an inner reaction zone. The particles enter the heating zone annulus at an upper inlet and exit the heating zone annulus at a lower outlet. The heated particles supply heat to the inner reaction zone.

Annular heated fluidized bed reactor

An improved method for the pyrolysis of silane in a free-space reactor. The improved method involves non-uniform heat input along the axial length of a free-space silane pyrolysis reactor so that the axial temperature profile along the length of the surrounding reactor wall is essentially constant.

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East Aurora, NY, United States of America

Richard A Van Slooten