Entegris, Inc.

Poco Graphite, Inc.

Rex Gerald Sheppard

Troy B Scoggins

Abuagela H Rashed

Jonathan Loyd Burr

Donald J Bray

Leland A Hardcastle

David F Dingus

Carlo Waldfried

Mackenzie E King

A silicon carbide-graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material. Such material may be formed by contacting a precursor graphite article with silicon monoxide (SiO) gas under chemical reaction conditions that are effective to convert an exterior portion of the precursor graphite article to a silicon carbide matrix material in which graphite is present in inclusions therein, and wherein the silicon carbide matrix material and interior bulk graphite material interpenetrate one another at an interfacial region therebetween. Such silicon carbide-graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.

Silicon carbide/graphite composite and articles and assemblies comprising same

Described are glass-forming molds made of a graphite mold body and a coating formed by atomic layer deposition, with the coating being made of alumina or a combination of alumina and yttria.

Coatings for glass-shaping molds and molds comprising the same

A carbon material is described, having utility for fabricating an electrode of an electrochemical energy device, wherein the carbon material includes a particulate carbon having a particle size din a range of from 1 to 15 &#x3bc;m, a bulk density in a range of from 0.3 g/cc to 1.2 g/cc, a surface area as measured by nitrogen BET surface area determination at 25&#xb0; C. that does not exceed 10 m/g, and an impurity content of less than 3000 ppm by weight, based on weight of the carbon material. Such carbon material may be utilized in amorphous or graphitic form in an electrode of an electrochemical energy device, such as a negative electrode of a lithium-ion battery or a lithium-ion hybrid capacitor.

Carbon electrode and lithium ion hybrid capacitor comprising same

A method of producing a densified SiC article is provided. Near-net shape porous silicon carbide articles are produced and densified using the developed method. A substantial number of pores within the porous near-net shape silicon carbide article are filled (impregnated) with a carbon precursor, a silicon carbide precursor, or a mixture of both. The carbon precursor can be liquid or gas. The filled SiC preform is heated to convert the carbon or silicon carbide precursor to porous carbon or SiC preform inside the pores of the net-shape silicon carbide article. The impregnation/pyrolysis cycle is repeated until the desired amount of carbon and/or silicon carbide is achieved. In case of a carbon or a mixture of silicon carbide/carbon precursor is used, the pyrolyzed near-net shape silicon carbide article is then contacted with silicon in an inert atmosphere. The silicon diffuses through the pyrolyzed near-net shape silicon carbide article and reacts with the carbon contained within the pores of the porous SiC preform producing a new phase of silicon carbide within the pores of the near-net shape silicon carbide article. The produced silicon carbide is a near-net dense silicon carbide article.

Process for the manufacturing of dense silicon carbide

A process for producing solid, porous graphites which provides a more uniform density gradient throughout the ultimate product. The process utilizes a pressure drop during processing in order to induce boiling and varies the processing pressure between an initial pressure which exceeds 1000 psig and a final processing pressure which generally exceeds the initial pressure. The particular processing techniques employed allow additional viscosity manipulation as well as improved density gradient characteristics in the ultimate product. The final products have bulk thermal conductivities in the range from 90-300 W/mK with apparent densities ranging from about 0.678 g/cc-1.5 g/cc

Process for making porous graphite and articles produced therefrom

A process for producing molded pitch based foam is shown which provides a more uniform density gradient throughout the ultimate product. The process utilizes a pressure drop during processing in order to induce foaming. By inducing foaming through process depressurization, additional viscosity manipulation can be achieved as well as improved density gradient characteristics in the ultimate product.

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Decatur, TX, United States of America

Rex Gerald Sheppard