Vistec Electron Beam Gmbh

René Bauer

Thomas Peschel

Stefan Risse

Gerd Harnisch

Gerhard Schubert

Ulf-Carsten Kirschstein

Christoph Schenk

Christian Jackel

Michael Boehm

Michael Böhm

Christoph Dr Schenk

Stefan Dr Risse

Thomas Dr Peschel

A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.

Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application

A table system for vacuum application has a base plate and a moving table guided by aerostatic bearing units. The bearing units () are connected to supply lines and suction lines for supplying and extracting the gas required for the operation of the bearing units and are provided in each instance with a sealing system having at least one stage and comprising suction channel and sealing gap for sealing relative to the vacuum. The table system is characterized in that the aerostatic bearing units () are constructed at least partially as swivel joints, and a push rod () which is actuated by a drive () for guiding the moving table laterally is connected to the rotating part () of each swivel joint, and in that the push rods () are hollow and constitute a component part of the suction lines for extracting the operating gas.

Aerostatically guided table system for vacuum application

A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

Table guided by aerostatic bearing elements for vacuum application

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Jena, Germany

René Bauer