Applied Materials, Inc.

Rene T Correa

David T Or

Robbert M Vermeulen

Shaun W Crawford

Keith K Koai

Youssef A Loldj

Mark William Curry

Daniel S Brown

Allen Fox

Eric W Schieve

Barry Page

William D Pyzel

An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.

Apparatus and methods for ambient air abatement of electronic manufacturing effluent

An apparatus for positioning a substrate support within a processing chamber is provided. In one embodiment, an apparatus for positioning a substrate support includes a yoke comprising a curved surface with a first slot formed therethrough, a base comprising a first surface adapted to support the substrate support and a curved second surface, wherein the curved second surface mates with the curved surface of the yoke and a first slot is formed through the curved second surface of the base, and a first threaded member disposed through the first slot in the yoke and the first slot in the base.

Substrate support lift mechanism

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San Jose, CA, United States of America

Rene T Correa