Vistec Semiconductor Systems Gmbh

René Schenck

Albert Kreh

Henning Backhauss

Frank A Hiltawski, Legal Representative

Magdalena I Hiltawski, Legal Representative

A system for inspecting a disc-shaped substrateis disclosed. The systemis surrounded by a housing. A tablethat is movable in at least an X-direction and a Y-direction and is borne by a mounting plateis provided within the housing. The mounting plateis vibration isolated in comparison to the housing. Equally, an exhaust unitis provided beneath the mounting plateand arranged at a distance from it. The exhaust unitpossesses an openingfor air entry. The openingfor air entry is provided in the exhaust unit between an end of the mounting plateand a wall of the housing

System for inspecting a disk-shaped object

A system for the detection of macrodefects is disclosed, the system being surrounded by a housing () and being subdivided into a first segment (), a second segment (), and a third segment (). Provided in the second segment () is a stage (), displaceable in the X direction and Y direction, on which a wafer () is placed. Located in the first segment () is an aspiration device () that directs aspirated air via an air guide () into the second segment (), the air guide () encompassing several air-directing panels () so that an air flow () is guided in parallel fashion over the wafer ().

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Jena, Germany

René Schenck