Asml Netherlands B.v.

Ahrin Bv

Rene Breeuwer

Nicolaas Ten Kate

Nicolaas Rudolf Kemper

Arno Willem Frederik Volker

Johannes Petrus Maria Smeulers

Stefan Philip Christiaan Belfroid

In an immersion lithography apparatus, ultrasonic waves are used to atomize liquid on a surface of the substrate.

Lithographic apparatus and device manufacturing method

A method and an apparatus for determining the velocity, direction and other magnitudes of a flow, in particular a gas flow, in which a strongly damped acoustic signal is emitted by a first transducer in a first direction through the flow towards a second transducer producing a damped electric signal, the first deflection thereof being compared with a threshold value which is lower than the peak value of said deflection, and exceeding said threshold value being used as the end of the time measurement period started at the emission of the acoustic signal by said first transducer. In particular a single first transducer is used, and a reflecting body is placed in front of said first transducer, adapted to reflect the acoustic pulses emitted by said transducer through the flow in different directions towards one or more second transducers.

Method and an apparatus for determining the velocity, direction and

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Delft, Netherlands

Rene Breeuwer