Taiwan Semiconductor Manufacturing Comp. Ltd.

Ren-jyue Wang

Yi-Ming Lin

Sheng-Chun Yang

Chih-Lung Cheng

Po-Chih Huang

Xuan-Yang Zheng

Yu-Hsiang Juan

Chih-Yuan Wang

The present disclosure provides a method and a system therefore for processing wafer. The method includes: extracting a first gas from a chamber via a first route; blocking a second route used to be pumped down to chuck a wafer placed in the chamber, wherein the second route connects the chamber and the first route; and providing a second gas via a third route to purge a junction of the first route and the second route.

Method and system for processing wafer

Growing community of inventors

HSINCHU, Taiwan

Ren-jyue Wang