Stmicroelectronics (crolles 2) Sas

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Stmicroelectronics (rousset) Sas

Stmicroelectronics S.a.

Remy Berthelon

Francois Andrieu

Philippe Boivin

Olivier Weber

Daniel Benoit

Franck Arnaud

Pierre Morin

Didier Dutartre

Bastien Giraud

François Andrieu

Elise Baylac

An electronic chip includes at least a first array of first elementary cells and a second array of second elementary cells. The first and second elementary cells form two types of phase change memory having a storage element formed by a volume of phase change material having either a crystalline state or an amorphous state depending on the bit stored. Each first elementary cell includes a volume of a first phase change material, and each second elementary cell includes a volume of a second phase change material that is different from the first material. Each elementary cell includes a heating connector configured for the passage of a heating current adapted to cause a phase change of the volume of phase change material of the elementary cell.

Electronic chip with two phase change memories

A method for manufacturing an electronic chip includes providing a semiconductor layer located on an insulator covering a semiconductor substrate. First and second portions of the semiconductor layer are oxidized up to the insulator. Stresses are generated in third portions of the semiconductor layer, and each of the third portions extend between two portions of the semiconductor layer that are oxidized. Cavities are formed which extend at least to the substrate through the second portions and the insulator. Bipolar transistors are formed in at least part of the cavities and first field effect transistors are formed in and on the third portions. Phase change memory points are coupled to the bipolar transistors.

Strained transistors and phase change memory

The present disclosure concerns a phase-change memory manufacturing method and a phase-change memory device. The method includes forming a first insulating layer in cavities located vertically in line with strips of phase-change material, and anisotropically etching the portions of the first insulating layer located at the bottom of the cavities; and a phase-change memory device including a first insulating layer against lateral walls of cavities located vertically in line with strips of phase-change material.

Phase-change memory with an insulating layer on a cavity sidewall

Phase-change memory with insulated walls

Longitudinal trenches extend between and on either side of first and second side-by-side strip areas. Transverse trenches extend from one edge to another edge of the first strip area to define tensilely strained semiconductor slabs in the first strip area, with the second strip area including portions that are compressively strained in the longitudinal direction and/or tensilely strained in the transverse direction. In the first strip area, N-channel MOS transistors are located inside and on top of the semiconductor slabs. In the second strip area, P-channel MOS transistors are located inside and on top of the portions.

Integrated circuit chip with strained NMOS and PMOS transistors

The application relates to an integrated circuit with SRAM memory and provided with several superimposed levels of transistors, the integrated circuit including SRAM cells provided with a first transistor and a second transistor belonging to an upper level of transistors and each having a double gate composed of an upper electrode and a lower electrode laid out on either side of a semiconductor layer, a lower gate electrode of the first transistor being connected to a lower gate electrode of the second transistor.

3D SRAM circuit with double gate transistors with improved layout

An integrated circuit includes a substrate; a buried insulating layer; at least one nMOS transistor comprising a semiconductor layer placed above the buried insulating layer; at least one pMOS transistor comprising a semiconductor layer placed above the buried insulating layer; at least one semiconductor groundplane that may be doped or a metal, placed above the substrate and below the buried insulating layer, said buried plane being common to the nMOS transistor and to the pMOS transistor; at least one gate insulator and a gate that is common to the nMOS transistor and to the pMOS transistor and that is located above the channel of these transistors and facing the groundplane, the area of the groundplane at least covering the area of the gate in vertical projection; the nMOS transistor being separated from the pMOS transistor by an isolation defined between the semiconductor layer of the nMOS transistor and the semiconductor layer of the pMOS transistor, the isolation being located in the buried insulating layer and making contact with the groundplane; at least one shared contact making electrical contact with the common gate and with the common groundplane, the shared contact passing through the buried insulating layer or the isolation.

Optimized double-gate transistors and fabricating process

An integrated circuit is provided, including a first pair including a first nMOS transistor and a first pMOS transistor; a second pair including a second nMOS transistor and a second pMOS transistor; the first and second pMOS transistors including a channel that is subjected to compressive stress and made of an SiGe alloy, and a gate of said transistors being positioned at least 250 nm from a border of an active zone of said transistors; a third pair including a third nMOS transistor having a same construction as the first nMOS transistor and a third pMOS transistor having a same construction as the second pMOS transistor and exhibiting a compressive stress that is lower by at least 250 MPa, the gate of said transistors of the third pair being positioned at most 200 nm from the border.

Integrated circuit comprising balanced cells at the active

An integrated circuit is provided, including: a first pair including a first nMOS transistor and a first pMOS transistor; a second pair including a second nMOS transistor and a second pMOS transistor; the first and the second nMOS transistors including a channel region made of silicon that is subjected to tensile stress, and their respective gates being positioned at least 250 nm from a border of their active zone; and a third pair including a third nMOS transistor having a same construction as the second nMOS transistor and a third pMOS transistor having a same construction as the first pMOS transistor and having a tensile stress that is lower by at least 250 MPa than the tensile stress of the channel region, respective gates of the transistors of the third pair being positioned at most 200 nm from a border of their active zone.

Integrated circuit including balanced cells limiting an active area

Longitudinal trenches extend between and on either side of first and second side-by-side strips. Transverse trenches extend from one edge to another edge of the first strip to define tensilely strained semiconductor slabs in the first strip, with the second strip including portions that are compressively strained in the longitudinal direction and/or tensilely strained in the transverse direction. In the first strip, N-channel MOS transistors are located inside and on top of the semiconductor slabs. In the second strip, P-channel MOS transistors are located inside and on top of the portions.

A strained semiconductor layer is produced from a semiconductor layer extending on an insulating layer. A thermal oxidization is performed on the semiconductor layer across its entire thickness to form two bars extending in a direction of a transistor width. Insulating trenches are formed in a direction of a transistor length. A strain of the strained semiconductor layer is induced in one implementation before the thermal oxidation is performed. Alternatively, the strain is induced after the thermal oxidation is performed. The insulating trenches serve to release a component of the strain extending in the direction of transistor width. A component of the strain extending in the direction of transistor length is maintained. The bars and trenches delimit an active area of the transistor include source, drain and channel regions.

Growing community of inventors

Saint Martin Heres, France

Remy Berthelon