Ams International Ag

Remco Pijnenburg

Peter G Steeneken

Casper Van Der Avoort

Martijn Goossens

Willem Besling

Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

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Eindhoven, Netherlands

Remco Pijnenburg