Wacker-Chemie Gmbh

Wacker Chemie Ag

Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh

Reinhard Wolf

Dirk Flottmann

Walter Haeckl

Erich Tomzig

Karl Hesse

Matthaus Schantz

Wolfgang Hensel

Gerhard Ast

Wilhelm Hoebold

Wilhelm Höbold

The invention provides a process for producing polycrystalline silicon, by introducing reaction gases containing a silicon-containing component and hydrogen into reactors to deposit silicon, wherein a purified condensate from a first deposition process in a first reactor is supplied to a second reactor, and is used in a second deposition process in that second reactor.

Process for producing polycrystalline silicon

There are a device and method for protecting semiconductor material, wherein semiconductor material is processed on a surface of stabilized ice made from ultrapure water and particles of semiconductor material.

Method and device for processing semiconductor material

A method and a device for the separation of semiconductor material has the separation procedure carried out on screens coated with ice made of ultrapure water, optionally mixed with particles of semiconductor material. During the separation, the screens are sprayed with ultrapure water and the screen holes are cut free.

Separation of semiconductor material

A device for protecting semiconductor material includes a support and a surface made of ice formed from ultrapure water. Semiconductor material is situated on this support surface.

Crushing of silicon on ultrapure ice

A method and apparatus for pulling single crystals from a melt of semicontor material, in which a monocrystalline seed crystal grows to form a single crystal, the seed crystal being dipped into the melt and raised in a controlled manner in the vertical direction with respect to the melt, while the melt forms a molten pool which is held on a support body only by the surface tension and by electromagnetic forces due to an induction coil. This method includes recharging the melt with semiconductor material in solid or liquid form during the growth of the single crystal.

Growing community of inventors

Emmerting, Germany

Reinhard Wolf