Carl Zeiss Jena Gmbh

Carl Zeiss Microimaging Gmbh

Reinhard Steiner

Ralf Wolleschensky

Hans-Juergen Dobschal

Matthias Burkhardt

Thomas Hartmann

Stefan Mack

Dieter Graefe

Karlheinz Bartzke

Karl-Heinz Klopfleisch

Peter Dittrich

The invention is directed to a highly sensitive spectrum analysis unit with a diffraction grating, wherein a parallel light bundle having a wavelength range impinges on a diffraction grating which splits the different wavelengths into spectra by diffraction in first directions, and wavelength partial ranges of the spectrally split light bundle can be focused on a detector row by means of camera optics, and evaluation electronics are connected to the detector row and acquire the generated spectrum as information and display it. The invention is characterized in that the light bundle passes a first optical element, and then wavelength partial ranges of a spectrally split light bundle impinge on respective partial regions of a diffraction grating, the diffraction grating having the same grating constant across all partial regions and a changing profile shape, the profile shapes generating different blaze wavelengths that lie in the respective wavelength partial ranges.

Highly sensitive spectroscopic unit

In an adjusting device for displacing individual elements () of optical systems or of measuring systems in which the element to be displaced is movable on a base () along a predetermined direction (x) by means of a piezoelectric actuator arrangement () which is supported by the element () and which is constructed and controllable in such a way that it exerts shock pulses on the element () in order to carry out a stepwise movement of the element () on the base (), the element () is arranged in a body () which has an open or closed hollow cross section and is supported in a frictional engagement on this body, at least at one location, with the intermediary of a pretensioned spring device ().

Adjusting device for displacing individual elements of optical systems or of measuring systems

A microscope system for detecting the emission distribution of specimens which emit light at least in a punctiform manner, particularly for failure analysis of integrated circuits, comprises an imaging beam path from the specimen in the direction of an at least one-dimensional receiver distribution, wherein at least one element is provided in the imaging beam path for spectral division of the light which is emitted at least in a punctiform manner.

Microscope system for the detection of emission distribution and process

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Stadtroda, Germany

Reinhard Steiner