Balzers Aktiengesellschaft

Unaxis Trading Ag

Other

Unaxis-balzers Aktiengesellschaft

Unaxis Balzers Limited

Balzers Hochvakuum Ag

Oberlikon Trading Ag, Trubbach

Oerlikon Surface Solutions Ag, Pfaffikon

Reinhard Sperger

Helmut Rudigier

Johannes Edlingger

Maria Simotti

Johannes Edlinger

Claus Heine-Kempkens

Peter Wierer

Joe Haggerty

Steffen Capello

Anton Hafner

Jorge Darr

Helmut Schoech

Helmut Schoch

Peter Bluher

Hartmut Zarfl

Ernst Luger

A pattern structure of at least two different layer system elements disposed adjacent one beside the other upon a carrier substrate, at least one of said layer system elements comprises a layer of dielectric material, the layer of dielectric material residing upon a layer of a material that is resistant to activated oxygen or activated water and having a second surface facing toward the substrate. The dielectric layer of the one layer system element forms a disturbed region between the adjacent layer system elements, the dielectric layer having a thickness of dand wherein the disturbed region has a width of at most 10*d.

Interference colored filters

A light beam preparation arrangement includes a light tunnel, a rotatable unit, and a drive unit. In one aspect, a fixation rigidly attaches the light tunnel directly to the drive unit. In another aspect, temperature of the light tunnel in controlled. In another aspect, the rotatable unit is spaced a distance from the light tunnel, and the distance is controlled. In another aspect, alignment between the light tunnel and the rotatable unit is controlled. In another apsect, the light tunnel is hollow and a gas flows though the tunnel.

Light beam preparation arrangement

A pattern structure has at least two different color filter elements disposed one beside the other on a carrier substrate. Each element includes a layer of dielectric material, the layer of dielectric material residing at at least one of the filter elements on a layer of a material that is resistant to activated oxygen or activated water. The layer of resistant material has a second surface pointing toward the substrate and is made of silicon or silicon dioxide.

A process for the production of a color filter layer system structure on a substrate uses a structure lacquer layer which is deposited in a lift-off technique on the substrate. Lacquer layer surface regions and regions free of lacquer layer are present. Subsequently through a vacuum coating process a color filter layer system is deposited and subsequently with the lacquer layer surface regions the regions of the color filter layer system deposited thereon are removed. The deposition of the color filter layer system takes place through a plasma-enhanced coating at a temperature of maximally 150&deg; C. The deposition takes place, for example, by sputtering or plasma-enhanced vapor deposition.

Method for producing a structure of interference colored filters

A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.

Dielectric interference filter system, LCD-display and CCD-arrangement as well as process for manufacturing a dielectric interference filter system and use of this process

A first coating layer structure,is produced by coating, alignment, exposure and development. On this coating layer structure,is deposited the first colour filter layer system,. Over the entire colour filter layer system,is deposited a sacrificial layer,Outside the vacuum container the coating layer structure is dissolved and with it the colour filter layer system regions,are removed. A further process of coating, alignment, exposure and development is carried out to create a coating layer structure,. Next the second colour filter layer system,and the second sacrificial layer,are deposited. Thereby the sacrificial layer,withstands the step of dissolving the coating and can be removed finally without damaging the colour filter layer system regions. Accordingly, any flakes,remaining from the lift-off are removed with the sacrificial layer

Process for production of a structure of color filter layer system regions

A compound glass arrangement comprises between two glass layers (,) and embedded between two foils (,) a layer carrier foil (,). On the carrier foil (,) there is provided a coating (,) which is exclusively dielectric. It has a maximum of reflection for light in the near infrared spectral range and a transmission maximum for light in the visible spectral range.

Composite glass and method for producing a coated plastic foil, preferably therefor

In order to drastically decrease, the differences of reflection as well as the differences of color in the region with a conductive electrode structure (5) facing the viewing environment (U) on a liquid crystal display, and a region without the structure corresponding to regions (B.sub.I) and (B.sub.o), the invention provides a compensation layer configuration (7) on at least one side of the electrode arrangement (5) facing the viewing environment (U). The configuration is laid out so that reflection differences of the regions become minimal as do the color differences of the regions caused by their spectral reflection profile.

Liquid crystal display

A coated wear resistant and transparent glass substrate has a multi-layer system with at least one layer of an oxynitride of one of hafnium, zirconium, tantalum and titanium, and with no metal layer. The substrate with multi-layer system has a reduced sun energy transmittance and anti-reflective effect in the visual spectral range.

Coated transparent substrate

A coated transparent substrate is composed of a multi-layer layer-system on at least one of its sides with at least one layer of the oxynitride of hafnium, the layer-system comprising a sequence of hafnium-oxynitride layer and silicon-oxide layer.

Growing community of inventors

Feldkirch, Austria

Reinhard Sperger