Other

Centrotherm International Ag

Universitat Konstanz

Centrotherm Photovoltaics Ag

Reinhard Lenz

Daniel Biro

Dieter Zernickel

Robert Michael Hartung

Hans-Peter Elser

Gernot Wandel

Matthias Tumback

Moritz Vogt

Peter V&ouml;lk

Hans Reichart

Andreas Kränzel

A cooling module for cooling substrates, in particular solar cells having a paste printed thereon after passing through a heating module is described. The cooling module comprises an elongated cooling chamber having an inlet opening, which is adjacent to a heating module, and an outlet opening, as well as a transport unit for transporting substrates through the elongated cooling chamber, wherein the transport unit defines a transport plane for the substrates. At least one first cooling unit is provided. The cooling unit has a plurality of first plate elements, which are arranged in substance perpendicular to and above the transport plane in the cooling chamber, at least one first conduit which extends through the first plate elements and is in a thermally conducting relationship therewith, and at least one conveying unit for conveying a cooling fluid through the first conduit. A conveying unit for conveying gas, in particular air, via spaces between the plate elements towards the transport plane is also provided. Also, an apparatus for thermally treating substrates, in particular solar cells, having a paste printed thereon is described. Said apparatus comprises a heating module having an elongated heating chamber and at least one adjacent cooling module having an elongated cooling chamber. A transport unit for transporting that substrates through the heating chamber and the cooling chamber is provided, wherein the transport unit comprises a revolving, gas permeable transport belt, which forms a transport section and a return section. The transport section extends through the heating chamber and the cooling chamber, while the return section has a portion which extends through at least a portion of the cooling chamber and wherein the return section is arranged outside of the heating chamber.

Cooling module and apparatus for thermally treating substrates

A transport device for transporting to-be-processed elements through a high-temperature zone and a corresponding method is described. The transport device operates according to the walking beam principle, with thin, elongated carrier elements made of a flexible material, which are maintained under tensile stress along the longitudinal axis of the carrier elements, being provided instead of conventional walking beams. The device permits low contamination transport of the elements through a high-temperature zone and improved utilization of energy as well as the ability to use a RTP process.

Transport device and method of transporting to-be-processed elements through a high-temperature zone

Growing community of inventors

Blaubeuren, Germany

Reinhard Lenz