First Solar, Inc.

Von Ardenne Anlagentechnik Gmbh

Von Ardenne Gmbh

Reinhard Jaeger

Michael Hentschel

Ricky Charles Powell

Steffen Lessmann

Michael Huhn

Hubertus Von Der Waydbrink

Reinhardt Bauer

Georg Laimer

Ulf Seyfert

Daniel Stange

Damir Muchamedjarow

Marco Kenne

Christoph Dubau

Steffen Leβmann

Thomas Bock

In various embodiments, a transporting device for transporting a substrate in a process chamber is provided. The transporting device includes a guiding rail arrangement having two guiding rails for mounting a multiplicity of bars between the two guiding rails. The two guiding rails form a closed path of movement along which the multiplicity of bars are guided. The transporting device further includes the multiplicity of bars that are mounted in the guiding rail arrangement, and a drive device for pushing at least one bar of the multiplicity of bars in such a way that, in a transporting region of the guiding rail arrangement, in each case multiple bars of the multiplicity of bars are pushed against one another and the bars that have been pushed against one another move along the path of movement in the transporting region.

Transporting device, processing arrangement and coating method

A method and device are provided for cleaning of an optical position measurement system in a coating installation. The optical position measurement system includes a cantilever, and a sensor head having a radiation inlet and/or outlet for the reception and/or emission of an optical signal, at a free end of the cantilever. For tempering of the sensor head, a local thermoregulation is applied using a heater and/or cooling device for heating and/or cooling of the sensor head depending on thermal conductivity of material of at least the sensor head and depending on secondary heat in the coating installation.

Method and device for cleaning an optical position measurement system for substrates in a coating installation

A system and method for coating substrates includes transporting rolls and a collecting container for collecting coating material.

System and method for coating substrates

The transport device especially for transporting flat substrates through a coating installation comprises a plurality of transporting rolls, which are arranged transversely in relation to the transporting direction, and supporting rolls are also provided.

Transport device, especially for transporting flat substrates through a coating installation

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Coswig, Germany

Reinhard Jaeger