Epcos Ag

Infineon Technologies Ag

Siemens Aktiengesellschaft

Tdk Electronics Ag

Reinhard Gabl

Franz Rinner

Martin Galler

Matthias Schreiter

Georg Kuegerl

Christoph Auer

Jan-Thorsten Reszat

Alfons Dehe

Ulrich Krumbein

Dieter Somitsch

Wolfgang Klein

Wolfram Wersing

Martin Jenkner

Mathias Link

Markus Laussermayer

Franz Hofmann

Roland Thewes

Carsten Ahrens

Alexander Glazunov

Heinz Florian

Sebastian Brunner

Marion Ottlinger

Hans-Dieter Feucht

Igor Kartashev

Georg Kügerl

Heinrich Zeininger

Patrick Schmidt-Winkel

Peter Fromherz

Raimund Peichl

Bjorn-Oliver Eversmann

Andreas Stani

Tamara Birkenmaier

Björn Eversmann

Markus Weiglhofer

Jan Weber

Johann Ramler

Mattias Schreiter

A structure for fixing a membrane to a carrier including a carrier; a suspended structure; and a holding structure with a rounded concave shape which is configured to fix the suspended structure to the carrier and where a tapered side of the holding structure physically connects to the suspended structure is disclosed. A method of forming the holding structure on a carrier to support a suspended structure is further disclosed. The method may include: forming a holding structure on a carrier; forming a suspended structure on the holding structure; shaping the holding structure such that it has a concave shape; and arranging the holding structure such that a tapered side of the holding structure physically connects to the suspended structure.

Support structure and method of forming a support structure

According to an embodiment, a microfabricated structure includes a cavity disposed in a substrate, a first clamping layer overlying the substrate, a deflectable membrane overlying the first clamping layer, and a second clamping layer overlying the deflectable membrane. A portion of the second clamping layer overlaps the cavity.

System and method for a microphone

A method for producing an electric contact-connection of a multilayer component is disclosed. In an embodiment, the method includes providing a main body of the multilayer component having internal electrode layers, applying an electrically conductive material and applying a photosensitive material on the electrically conductive material. The method further includes structuring the electrically conductive material via the photosensitive material such that the internal electrode layers alternatingly are covered and uncovered by the electrically conductive material and applying an insulating material after structuring the electrically conductive material such that the internal electrode layers are alternatingly covered by the electrically conductive material and by the insulating material.

Method for producing an electric contact connection of a multilayer component

A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Method of forming a piezoelectric actuator

A stackable piezoelectric actuator component () comprises a stack () of piezoelectric layers () and electrode layers () arranged therebetween, a voltage supply device () arranged outside the stack () and serving for making electrical contact with the electrode layers, a contact connection () for applying a voltage to the voltage supply device () and a further contact connection (), which is electrically coupled to the voltage supply device (). The contact connection () and the further contact connection () are designed complementarily with respect to one another in such a way that a further stackable piezoelectric actuator component (), comprising at least a contact connection or a further contact connection (), can be electrically coupled to the actuator component ().

Stackable piezoelectric actuator component

The invention relates to an actuator () having stacked piezoelements (), first and second inner electrodes () disposed alternatingly between the piezoelements (), a first outer electrode () which is electrically conductively connected to the first inner electrode (), a second outer electrode () which is electrically conductively connected to the second inner electrode (), characterized in that the actuator () comprises a plurality of actuator segments () and that the second outer electrode () comprises separate electrode segments () each of which are electrically conductively connected to the second inner electrodes () in one of the actuator segments ().

Actuator, actuator system and actuation of an actuator

The invention relates to an actuator having a sensor layer by which a temperature can be detected, and to a method for producing the same.

Actuator and method for producing same

In the method for monitoring flexural vibrations of a piezoactuator, a small-signal spectrum of a piezoactuator, which is provided and mounted for the purpose of exciting longitudinal vibrations, is measured and an excitation of a transverse vibration in the piezoactuator is detected from resonances occurring in the small-signal spectrum.

Method for monitoring flexural vibrations of a piezoactuator

Piezoelectric actuator of a multilayer design and method for fastening an outer electrode in a piezoelectric actuator

A solder material can be used for fastening an outer electrode on a piezoelectric component. The solder material contains tin as the main constituent and at least one addition from the group of cobalt, tungsten, osmium, titanium, vanadium, iron and rare earth metals. A piezoelectric component includes such a solder material. The solder material is applied by means of a base metallization.

Solder material for fastening an outer electrode on a piezoelectric component and piezoelectric component comprising a solder material

A multilayer piezo actuator is specified, in which piezoelectric layers and electrode layers are arranged to form a stack. Electrical contact is made with the electrode layers via two external electrodes which consist of wires which are woven with one another. The external electrodes are in this case connected over their entire area to the side surfaces of the stack. A method is also specified for fitting an external electrode.

Piezo actuator with external electrode soldered to outer face

A capacitor structure includes a lower electrode layer disposed on a substrate, an upper electrode layer and a crystalline zinc oxide-containing dielectric layer interposed between the electrode layers. The amorphous dielectric intermediate layer is interposed between the lower electrode layer and the crystalline zinc oxide-containing dielectric layer. A method for producing the aforementioned capacitor structure is also disclosed. The amorphous dielectric layer is adapted to produce during deposition of the zinc oxide an electrical field which is tipped in relation to the normal to the surface of the substrate surface or the lower electrode layer. The zinc oxide monocrystals grow at an angle, thereby providing a crystalline dielectric layer that can be induced to shear vibrations.

Piezo-acoustic thin film resonator having a crystalline zinc oxide layer

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Kufstein, Austria

Reinhard Gabl