Daimler-benz Ag

Reiner Schaub

Reinhard Zachai

Hans-Juergen Fuesser

Tim Gutheit

Wolfram Muench

Mona Ferguson

Karl-Heinrich Greeb

A composite structure for electronic components, having a base substrate with a flat side provided with a depression, and having a cover layer which is disposed on the flat side structured by the depression, and the depression being covered to form a hollow structure. The depression in the base substrate is created prior to the deposition of the cover layer and has a clear width measured parallel to the flat side that is less than one-half of its clear depth measured before the cover layer is applied. The vapor phase deposited cover layer is formed from a material which has a sufficiently high surface tension to promote three-dimensional growth of the vapor phase deposited layer.

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Darmstadt, Germany

Reiner Schaub