Applied Materials, Inc.

Leybold Aktiengesellschaft

Applied Materials Gmbh & Co Kg

Reiner Gertmann

Stefan Bangert

Klaus Michael

Helmut Grimm

Michael Koenig

Michael König

Uwe Schuessler

Bernhard Schonherr

Martin Hornung

Elisabeth Sommer

Gerard Lobig

Thomas Vogt

Uwe Schueßler

Lutz Kampmann

The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device for at least one of attaching and detaching a mask to the substrate, and a mask alignment device for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device is attached to the movable support so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.

Coating apparatus with rotation module

An apparatus for supporting a plurality of carriers or substrates is described. The apparatus includes a vacuum chamber and a rotatable support for supporting the plurality of carriers or substrates, wherein the support is provided within the vacuum chamber and is configured for rotating the supported plurality of carriers or substrates around a rotation axis.

Apparatus for providing a rotation carrier magazine, and method of operating thereof

A coating material to be evaporated in an evaporator cell disposed in a vacuum chamber is fed in the form of a wire to the evaporator cell in accordance with the depth of the molten bath, by a wire transport including a motor-driven shaft or roller and a counter-roller mounted on a movably journaled lever which in turn is movable via an electromagnetic actuator against the force of a spring means. A wire feed tube is arranged between the wire transport which draws fusible wire from a remote supply and feeds it to the evaporator boat where the wire is evaporated for coating a band-type substrate. The feed tube has a straight section which receives the wire concentrically from the transport and a gooseneck section toward said evaporator boat which twice deflects the wire to provide three points of contact with the inner wall of the tube, thus accurately positioning the wire while preventing clogging of the outlet orifice.

Apparatus for the continuous feeding of wire to an evaporator boat

Growing community of inventors

Linsengericht, Germany

Reiner Gertmann