Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,307 patents)
2 patents:
1. 12237178 - Substrate processing apparatus and substrate processing method
2. 11901197 - Substrate processing apparatus and substrate processing method