Asml Netherlands B.v.

Raymond Turk

Bastiaan Andreas Wilhelmus Hubertus Knarren

Allard Eelco Kooiker

Nico Antonius Hubertus Johannes Boonen

A detector module () is described that includes at least one detector () for sensing photon radiation, an electronic circuit () coupled to the at least one detector (), and a housing () having a first and a second body (), each having a bottom part () and an at least partially cylindrical part () extending from the bottom part (), wherein the at least partially cylindrical part () of the first body () is thermally coupled with the at least partially cylindrical part () of the second body (), wherein the at least partially cylindrical part () of the first body () extends towards the bottom part () of the second body (), and wherein the electronic circuit () is arranged inside the housing (). A lithographic apparatus including the detector module () is also described.

Detector module, cooling arrangement and lithographic apparatus comprising a detector module

A cooling arrangement is described and includes a heat sink having a first thermal contact surface, an object having a second thermal contact surface and a resilient wall. The first thermal contact surface and the second thermal contact surface face each other and define a gap. The resilient wall is part of an enclosure that surrounds a space at least comprising the gap, and the cooling arrangement includes a facility to maintain a pressure difference between the space and an environment of the cooling arrangement. Additionally, a lithographic apparatus comprising such a cooling arrangement is described.

Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement

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Riethoven, Netherlands

Raymond Turk