Integrated Designs, L.p.

Saint-gobain Performance Plastics Corporation

Raymond T Savard

John Charles Vines

Kenji A Kingsford

John Laessle

Carl A Martin

Mario Fregoso

Gary Minor

Darko Hadzidedic

Greg Gray

Vernon H Foersterling

A pump for use in handling one or more different process fluids includes a plurality of pumping chambers having a process fluid inlet and a process fluid outlet, process fluid outlet coupled to a process fluid valve on each pumping chamber for selectively preventing and allowing the flow of process fluid through the pumping chamber, an actuation mechanism for pumping actuating fluid to a plurality of actuating fluid chambers in fluid communication with the actuating fluid chambers to permit flow into each actuating fluid chamber of actuating fluid, and at least one diaphragm separating each pumping chamber from an associated actuating fluid chamber, for separating process fluid from actuating fluid. Operation of the actuation mechanism displaces actuating fluid and causes actuating fluid to flow only into each of the actuating fluid chambers having an opened process fluid valve, resulting in pumping.

Precision pump with multiple heads

Anti-pumping dispense valves, constructed according to principles of this invention, comprise a fluid transport housing having a fluid inlet passage extending into the housing, a fluid outlet passage extending out of the housing, and a fluid transport chamber disposed within the housing. The fluid transport chamber includes an valve seat. An actuator housing is attached to the fluid transport housing and includes an actuator chamber that is in contact with the fluid transport chambers. A diaphragm/poppet assembly is disposed within the fluid transport chamber and comprises a poppet positioned downstream of the seat for placement against the seat to stop fluid flow through the first fluid transport chamber. An actuator is disposed within the actuator chamber for moving the diaphragm/poppet assembly. Dispense valves of this invention operate to provide a slight vacuum within the fluid flow passageway in the valve to retain or pull back into the valve any nondispensed liquid, thereby eliminating and/or greatly reducing the possibility product contamination via unwanted excess liquid dispensement or dried residual liquid dispensement.

Anti-pumping dispense valve

A method and system for dispensing a precise amount of a chemical used in the fabrication of semiconductors utilizes rolling membrane pump and calculates an amount by which to change a dispense based at least in part on a predicted membrane flex. Membrane flex is predicted, at least in part, by the shape of the membrane, a volume of liquid to be dispensed and a pressure during dispense.

Method and apparatus for dispensing fluids

A system and method for reducing the time for charging a filter in a liquid dispensing system, such as one utilizing a positive displacement pump, is disclosed. The filter is located at the input side of the pump between the source of the liquid and the pump. In order to prevent air from the filter from entering the pump a reservoir is provided between the filter and the source of the fluid. Air from the filter is vented into the reservoir through a vent tube. A vacuum is used to draw air from the filter and, through the reservoir.

Liquid dispensing system with enhanced filter

A method and system for dispensing a precise amount of a fluid utilizing a rolling membrane pumping system is disclosed. In the preferred embodiment, the method comprises calculating an amount by which to change a dispense based at least in part on a predicted membrane flex if a particular dispense is other than a first dispense, wherein said predicted membrane flex is based at least in part on a maximum pump chamber pressure during the first dispense; calculating an amount by which to change a dispense based at least in part on a shape of the membrane if a particular dispense is a first dispense; moving a piston in the pumping system based at least in part on the calculated amount; opening an output valve of the pumping system; monitoring the pump chamber pressure to detect a sudden decrease in said pump chamber pressure to signal a mechanical failure in the pumping system; and determining a maximum pressure in the pump chamber during the movement of the piston.

Growing community of inventors

Pilot Point, TX, United States of America

Raymond T Savard