Breault Research Organization, Inc.

Other

Engineering Synthesis Design, Inc.

Trology, LLC

Raymond Joseph Castonguay

Piotr Szwaykowski

Frederick Nicholas Bushroe

Federick N Bushroe

Polarization based interferometric methods suffer from errors caused by the internal instrument birefringence. Disclosed herein are methods for using dual interferometric measurements allow separating the influence of instrument errors (e.g., due to geometry and birefringence errors) and the measured part. The interferometric system error in an interferometry system having two light sources orthogonally polarized with respect to each other wherein each light source reflects from a reference surface and a test surface, creating four reflected beams (Wr, Vr, Wt, Vt), may be determined by performing a first interference measurement (M) from Wr-Vt. A second interference measurement (M) from Wt-Vr is performed and a third measurement (M), indicative of the interferometric system error, is calculated by averaging the first and second measurements ([M+M]/2).

Methods for determining error in an interferometry system

A source module () generates mutually orthogonally polarized beams of light as emanating from two spatially separated point sources (Sv, Sw) for use in a phase shifting interferometer.

Interferometric system with reduced vibration sensitivity and related method

An optical measuring apparatus for measuring 3D surface profiles of an object comprising, in combination: a linear detector array; an imaging system including a light source to image the object onto the detector array; and machine readable software for producing a 3D topology map from a 2D image, wherein the apparatus is calibrated by changing the optical focus distance between the detector array and the object for the purpose of 3D measurement calibration, and changing the relative lateral positions between the detector array and the object for the purpose of scanning the object's surface.

High resolution three dimensional topography using a flatbed scanner

An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.

Scanning simultaneous phase-shifting interferometer

A back-end assembly for use with a front-end assembly in acquiring phase-shifted interferograms having a plurality of imaging modules (Ma, Mb, Mc). Each module (Ma, Mb, Mc) has a quarter wave plate (), a polarizer (), and an image sensor () so that each polarizer has a different rotation orientation thus acquiring phase-shifted interferograms.

Simultaneous phase shifting module for use in interferometry

A far-field measurement instrument has multiple imaging lenses cut into a pentagon shape and arranged in geodesic spherical configuration with a common field of view focused on the source of the scattered light to be measured. Aspheric lenses are used to facilitate collimation of large incident angles of scattered light. A measurement module, such as a camera, is used behind each lens. The measurement module may consist of an interferometer or Shack-Hartman wavefront sensor, thereby enabling the measurement of both intensity and phase of the scattered light.

Spherical scattering-light device for simultaneous phase and intensity measurements

A portable scatterometer and/or an angular radiated light measurement instrument that uses a measurement head which includes a double tapered fiber optic bundle with a concave front face to simultaneously collect partial or full hemispherically scattered light reflected from a point on a surface illuminated by a depolarized, telescopically focused, laser diode source, the light rays being received by each fiber normal to its face. The image of the collected light beams is minified and coupled by the fiber optic bundle into an anti-blooming CID camera with an x-y scanning area array which converts the light beams to electrical signals. In a unique real time, computer-controlled, data acquisition and reconstruction process, a frame grabber a unique algorithm are used to collect over 200,000 points of light reconstruct the data into a 2D or 3D scatter profile and display the results, all within one second. Multiple embodiments of the tapered fiber optic bundle collector are disclosed. Alignment mechanisms provide z-translation, azimuth, and focus adjustments. The measurement unit housing securable to a production line machine for use, such as, a quality control inspection device.

Process of acquiring with an X=Y scannable array camera light emanted

A portable scatterometer and/or an angular radiated light measurement instrument that uses a measurement head which includes a double tapered fiber optic bundle with a concave front face to simultaneously collect partial or full hemispherically scattered light reflected from a point on a surface illuminated by a depolarized, telescopically focused, laser diode source, the light rays being received by each fiber normal to its face. The image of the collected light beams is minified and coupled by the fiber optic bundle into an anti-blooming CID camera with an x-y scanning area array which converts the light beams to electrical signals. In a unique real time, computer-controlled, data acquisition and reconstruction process, a frame grabber and a unique algorithm are used to collect over 200,000 points of light, reconstruct the data into a 2D or 3D scatter profile and display the results, all within one second. Multiple embodiments of the tapered fiber optic bundle collector include a full hemispherical version with the laser source directed through the boule, a unitary boule fused from two tapered halves, a linear in-plane tapered bundle and a partial taper with imaging lens mode. Alignment mechanisms provide z-translation, azimuth, and focus adjustments. The measurement unit is in a compact, rugged aluminum housing which is adapted to be secured to a production line machine for a variety of services, such as, a quality control inspection device.

Apparatus for measuring reflected light utilizing spherically arranged

A portable scatterometer and/or an angular radiated light measurement instrument that uses a measurement head which includes a double tapered fiber optic bundle with a concave front face to simultaneously collect partial or full hemispherically scattered light reflected from a point on a surface illuminated by a depolarized, telescopically focused, laser diode source, the light rays being received by each fiber normal to its face. The image of the collected light beams is minifled and coupled by the fiber optic bundle into an anti-blooming CID camera with an x-y scanning area array which converts the light beams to electrical signals. In a unique real time, 486-computer-controlled, data acquisition and reconstruction process, a frame grabber and a unique algorithm are used to collect over 200,000 points of light, reconstruct the data into a 2D or 3D scatter profile, and display the results, all within one second. Multiple embodiments of the tapered fiber optic bundle collector include a full hemispherical version with the laser source directed through the boule, a unitary boule fused from two tapered halves, a linear in-plane tapered bundle and a partial taper with imaging lens mode. Alignment mechanisms provide z-translation, azimuth, and focus adjustments. The measurement unit is in a compact, rugged aluminum housing which is adapted to be secured to a production line machine for a variety of services, such as, a quality control inspection device.

Apparatus for collecting light and its method of manufacture

A portable scatterometer and/or an angular radiated light measurement instrument that uses a measurement head which includes a double tapered fiber optic bundle with a concave front face to simultaneously collect partial or full hemispherically scattered light reflected from a point on a surface illuminated by a depolarized, telescopically focused, laser diode source, the light rays being received by each fiber normal to its face. The image of the collected light beams is minified and coupled by the fiber optic bundle into an anti-blooming CID camera with an x-y scanning area array which converts the light beams to electrical signals. In a unique real time, computer-controlled data acquisition and reconstruction process, a frame grabber and a unique algorithm are used to collect over 200,000 points of light, reconstruct the data into a 2D or 3D scatter profile and display the results, all within one second. Multiple embodiments of the tapered fiber optic bundle collector include a full hemispherical version with the laser source directed through the boule, a unitary boule fused from two tapered halves, a linear in-plane tapered bundle and a partial taper with imaging lens mode. Alignment mechanisms provide z-translation, azimuth, and focus adjustments. The measurement unit is in a compact, rugged aluminum housing which is adapted to be secured to a production line machine for a variety of services, such as, a quality control inspection device.

Growing community of inventors

Tucson, AZ, United States of America

Raymond Joseph Castonguay