Asml Netherlands B.v.

Raymond Gerardus Marius Beeren

Martinus Hendrikus Antonius Leenders

Hans Jansen

Marco Koert Stavenga

Richard Joseph Bruls

Bauke Jansen

Kornelis Tijmen Hoekerd

Anthonius Martinus Cornelis Petrus De Jong

Peter Franciscus Wanten

Johannes Wilhelmus Jacobus Leonardus Cuijpers

An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves through a liquid to clean a surface of an immersion lithographic projection apparatus are disclosed. A flow, desirably a radial flow, is induced in the liquid.

Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method

An immersion lithographic projection apparatus having a megasonic transducer configured to clean a surface and a method of using megasonic waves to clean a surface of an immersion lithographic projection apparatus are disclosed.

Lithographic apparatus and lithographic apparatus cleaning method

A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.

Cleaning device and a lithographic apparatus cleaning method

A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.

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Dalhem, Belgium

Raymond Gerardus Marius Beeren