Acceeze, Inc.

Kla Tencor Corporation

Neophotonics Corporation

Paxera Corporation

Raymond Chu

Christian Wolters

Dieter Wilk

Chuanyong Huang

Tim Mahatdejkul

Wilson T C Wong

Gordana Neskovic

Qing Jiang

The present disclosure is directed to a method for designing an aperture in a mask for inspecting a wafer. The method includes the steps of scanning a collection plane of the wafer at a plurality of points and collecting data for at least a part of the wafer. The method also includes the step of mapping the data. A further step of the method includes configuring the aperture based on the mapped data.

Haze and defect distribution and aperture configuration in surface metrology inspectors

An optical tunable laser design () for the optic telecommunication industry is disclosed in this invention. This new design is economical, reliable, robust and with superior optical performances. The design offers broadband tunability, high output power, narrow laser line-width and high SMSR. And in addition, the tunable laser is distinguishable from conventional designs by the mere facts that there are no moving parts, therefore, making it very reliable, and the tuning method of this invention is non-thermal and non-mechanical making its tuning very fast in the sub-millisecond range. In the manufacturing front, it is low cost and easy to produce. It can be achieved with automation equipment like those used in the IC placement and PC assembly industry, therefore, the products as that disclosed in this invention can be provided with significantly reduced production costs and marketed with very competitive price. The side-mode-suppression ratio (SMSR) is further increased by implementing an etalon () having a specific fineness to cooperate with the Acousto-optical tuning filter (AOTF) ().

High performance compact external cavity laser (ECL) for telecomm applications

An optical tunable filter that includes an tunable acousto-opto deflector (AOD) for deflecting a broad band beam to an expander for projecting the broad band beam to a set of grating for generated a tuned output beam corresponding to a deflection from the AOD and a wavelength resolution of the set of gratings. The AOD further includes an RF driver for tuning the AOD with an RF driving signal. The AOD further comprises a directional tuning acousto-optic crystal. The optical beam expander further includes a first and a second beam expanding prisms that composed of a material suitable for a dense wavelength division multiplexing (DWDM) application over a wavelength range covering S, C and L bands.

Tuning a narrow band filter for telecommunication applications with an acoustic optical tunable filter

An optical tunable filter that includes a thin-film filter for band-passing at least two bands of wavelengths. The tunable filter further includes a tunable band-passing device tunable over the at least two bands for tuning to a tunable pass-band spectrally overlapped with one of the at least two bands. The tunable band-passing device further includes an Acousto-optical cell tunable with acoustic wave signals. The thin-film filter cooperating with the tunable band-pass device for generating a tunable output waveform that has substantially a square waveform spectrally corresponding to the at least two bands. The thin-film filter further cooperates with the tunable band-pass device for generating a tunable output waveform having substantially a square waveform over a spectral range of a C-band, an L-band and an S-band. The tunable band-pass device band-passes a tunable substantially Sinc-function-like waveform and the thin film filter band-passing a substantially square waveform with a center attenuated dip for compensating the tunable substantially Sinc-function waveform.

An optical tunable laser design for the optical telecommunication industry is disclosed in this invention. This new design is economical, reliable, robust and with superior optical performances. The design offers broadband tunability, high output power, narrow laser line-width and high SMSR. And in addition, the tunable laser is distinguishable from conventional designs by the mere facts that there are no moving parts, therefore, making it very reliable, and the tuning method of this invention is non-thermal and non-mechanical making its tuning very fast in the sub-millisecond range. In the manufacturing front, it is low cost and easy to produce. It can be achieved with automation equipment like those used in the IC placement and PC assembly industry, therefore, the products as that disclosed in this invention can be provided with significantly reduced production costs and marketed with very competitive price.

Miniaturized external cavity laser (ECL) implemented with acoustic optical tunable filter

This invention includes an Acousto-optical tuning device by employing the TeO2 in share mode, non-collinear and in high RF frequency (or large Bragg's deflection region), it is able to achieve the telecomm worthy tunable filter that provides high tuning speed, no-moving parts, very narrow filter line-width (0.2 nm for instance) and with miniature size practical for a optical telecom active module. This tuning characteristic is achieved by taking the particular advantages that the angle of incidence (AOI) and angle of diffraction (AOD) are divergent in a frequency range just suitable for a shorter wavelength application required by modern telecommunication systems while the acoustic wave decay in this frequency range can be properly managed to achieve the design goals. Furthermore, by generating a diffracted beam with larger AOD, implementation of filtering for optical propagations of different wavelengths can be conveniently selected. Other than the TeO2 crystals, the AOTF can also be formed with AsS3 and GeAsSe crystals based on the same acoustic-optical interaction processes at a higher RF frequency range as discussed in the above descriptions.

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Cupertino, CA, United States of America

Raymond Chu