Milli Sensor Systems+actuators

Kionix, Inc.

Raymond Carroll

Scott G Adams

Donato Cardarelli

Charles R Dauwalter

Joseph G Walsh

James Groves

An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.

Electrically decoupled silicon gyroscope

System for determining and controlling the peak amplitude and phase of an oscillating member

A tuned flexure accelerometer, comprising, a housing; a gimbal coupled to the housing for oscillation about a gimbal oscillation axis; and a reference mass coupled by one or more pivots to the gimbal to allow pivoting motion of the reference mass relative to the gimbal about a pivot axis which is transverse to the gimbal oscillation axis, the one or more pivots having an effective elastic restraint. The gimbal is oscillated about its oscillation axis, to thereby induce on the one or more pivots an oscillating negative elastic restraint, to reduce the effective elastic restraint of the pivots.

Tuned flexure accelerometer

Growing community of inventors

Boxford, MA, United States of America

Raymond Carroll