Veeco Instruments Inc.

Raymond C Logue

William E Quinn

Leo A Chin

Christopher J Morath

Arindam Sinharoy

Maria D Ferreira

Don Sirota

Chi-Jung Cheng

Wei Zhang

Owan C Watkins

A chemical vapor deposition or atomic layer deposition system includes a gas concentration sensor for determining the quantity of precursor gases admitted thereto. The gas concentration sensor can include a transmitter and a receiver for transmitting an acoustic signal across a chamber. In embodiments, the transmitter and receiver are designed to increase transmitted signal while reducing transmitted noise, facilitating use of the gas concentration sensor at low pressure and high temperature.

Gas concentration sensors and systems

An acoustical transformer having a last matching section that includes a protective barrier of low permeability. The protective barrier is in contact with a test medium. In one embodiment, the protective barrier comprises one or more low permeability layers, such as a metallic foil or metallic coating(s) disposed on a low impedance layer such as polyimide, so that the low impedance layer and the protective barrier constitute the last matching section of the acoustical transformer. In other embodiments, the protective barrier comprises a fluoropolymer. A method for determining the thicknesses of the various layers of the acoustical transformer for enhanced performance is also disclosed.

Apparatus and method for improved acoustical transformation

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Henderson, NV, United States of America

Raymond C Logue