Taiwan Semiconductor Manufacturing Comp. Ltd.

Ray-Wen Tsai

Hsueh-Cheng Lin

Tung-Gan Cheng

Chia-Fu Tsai

Yaw-Wen Wu

Cheng-Chao Lin

Hung-Tse Huang

Tung-Liang Wua

Chih-Jung Yeh

An apparatus and method for adjusting the position of a load port utilized in a semiconductor wafer processing system. Generally, a door opener can be configured for opening a door through which a semiconductor wafer may enter for subsequent positioning and processing thereof by a semiconductor wafer processing system. A load port is associated with the door opener. A calibration mechanism can then be utilized for calibrating the load port for leveling and height positioning, such that a plurality of directional axis associated with the load port do not interfere with one another, thereby conserving calibration time while permitting a single individual to perform calibration operations thereof.

Precise mechanism for load port adjustment

Growing community of inventors

Yun-Lin, Taiwan

Ray-Wen Tsai