Nextest Systems Corporation

Ray Wakefield

Craig Z Foster

Paul G Trudeau

Paul Magliocco

An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a feature defining a second plane. When the feature of the stiffening member defining the first plane is urged against the feature of the reference member defining a second plane the probe tips of the probe card are substantially planarized relative to the wafer prober.

Method for using probe card

A tester configured to stack with at least one other tester to provide a test system for simultaneously testing a number of devices in parallel on different testers, or testing a device having more pins than can be accommodated by a single tester. The tester includes a test site with a number of pin electronics channels, an interface for interfacing with the device, and a computer for interfacing with a host computer in the test system. The testers can be fastened directly to one another or to a common frame. Preferably, the interface enables a single device board to simultaneously engage interfaces on multiple testers. More preferably, the interface extends from a top surface of the tester to engage the device board. Vents in top and front surfaces of an enclosure enables movement of air to cool components of the tester without interference from testers on either side or a back of the enclosure.

Growing community of inventors

Santa Clara, CA, United States of America

Ray Wakefield