Applied Materials, Inc.

Ravindra Patil

Jonathan Stuart Frankel

Quoc Truong

Sumedh Acharya

Sekar Krishnasamy

Govindraj Desai

Dakshalkumar Patel

Mario Cambron

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.

Paddle configuration for a particle coating reactor

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Santa Clara, CA, United States of America

Ravindra Patil