Messer Industries USA, Inc.

Ravi Subramanian

Frank R Fitch

Steven Finley

A method for the continuous production of ozone and recovery of oxygen in a purge cycle adsorption process having four adsorbent beds. The method has the steps of feeding a mixture of ozone and oxygen to a first and second adsorbent bed wherein the first and the second adsorbent bed adsorb ozone and allow oxygen to pass through; recovering the oxygen from the first bed; feeding the oxygen from the second bed to a fourth adsorbent bed, wherein ozone is desorbed from the fourth bed; feeding clean dry air through a valve to the third adsorbent bed, and measuring the flow rate of the clean dry air through the valve, comparing this flow rate to a pre-calculated value and adjusting the flow rate of the clean dry air to equal the pre-calculated value; desorbing ozone from the third bed; and recovering ozone from the third bed and the fourth bed.

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Bridgewater, NJ, United States of America

Ravi Subramanian