Murata Manufacturing Co., Ltd.

Rauli Collin

Lasse Aaltonen

Konsta Wjuga

Antti Finne

A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.

Secondary sense loop with force feedback capability

A digital control circuitry for a MEMS gyroscope is provided. The digital control circuitry comprises a digital primary loop circuitry configured to process a digitized primary signal, a digital secondary loop circuitry configured to process a digitized secondary signal and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the digitized primary signal. The digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.

Digital controller for a MEMS gyroscope

A method is disclosed for performing calculations for an inclinometer device, as is a digital circuitry for performing such calculations. The circuitry comprises an interface for receiving detection signals from a sensor device and a CORDIC unit for performing calculation of inclinometer output values characterizing a resultant vector. The CORDIC calculation unit is configured to perform a calculation for resolving the angle between a resultant vector and a programmable reference value using hyperbolic CORDIC calculation. Pre-rotation may be performed for a vector before hyperbolic CORDIC arctangent calculation phases.

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Pirkkala, Finland

Rauli Collin