Wayne State University

Delphi Technologies, Inc.

Ratna Naik

Gregory William Auner

Joseph V Mantese

Adolph L Micheli

Norman William Schubring

Raymond Iezzi

Gary W Abrams

Flaminia Serina

James Patrick McCallister

Ka Yuen Simon Ng

Simon Ng

A pyroelectric sensor having an active regulation for maximizing pyroelectric sensor sensitivity is disclosed. The pyroelectric sensor comprises a ferroelectric transducer, and a regulator. The ferroelectric transducer may either be a homogenous ferroelectric transducer, a compositionally graded ferroelectric transducer, or an externally graded ferroelectric transducer. The regulator may either be an excitation regulator or a temperature regulator. A method for regulating the excitation or the temperature of a pyroelectric sensor for maximizing sensitivity of the pyroelectric sensor is also disclosed.

Active regulator for maximizing pyroelectric sensitivity

Hydrogen gas sensors employ an epitaxial layer of the thermodynamically stable form of aluminum nitride (AlN) as the 'insulator' in an MIS structure having a thin metal gate electrode suitable for catalytic dissociate of hydrogen, such as palladium, on a semiconductor substrate. The AlN is deposited by a low temperature technique known as Plasma Source Molecular Beam Epitaxy (PSMBE). When silicon (Si) is used the semiconducting substrate, the electrical behavior of the device is that of a normal nonlinear MIS capacitor. When a silicon carbide (SiC) is used, the electrical behavior of the device is that of a rectifying diode. Preferred structures are Pd/AlN/Si and Pd/AlN/SiC wherein the SiC is preferably 6H&#x2014;SiC.

MIS hydrogen sensors

A self-assembled nanobump array structure including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer.

Self-assembled nanobump array stuctures and a method to fabricate such structures

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Ann Arbor, MI, United States of America

Ratna Naik