California Institute of Technology

Rassul Bulatovich Karabalin

Michael Roukes

Michael C Cross

Matthew H Matheny

Luis Guillermo Villanueva Torrijo

Sotirios Masmanidis

Akram Sarwat Sadek

John Sequoyah Aldridge

Philip X-l Feng

Xiao-Li Feng

Eyal Kenig

Ron Lifshitz

Synchronization of oscillators based on anharmonic nanoelectromechanical resonators. Experimental implimentation allows for unprecedented observation and control of parameters governing the dynamics of synchronization. Close quantitative agreement is found between experimental data and theory describing reactively coupled Duffing resonators with fully saturated feedback gain. In the synchonized state, a significant reduction in the phase noise of the oscillators is demonstrated, which is key for applications such as sensors and clocks. Oscillator networks constructed from nanomechanical resonators form an important laboratory to commercialize and study synchronization&#x2014;given their high-quality factors, small footprint, and ease of co-integration with modern electronic signal processing technologies. Networks can be made including one-, two-, and three-dimensional networks. Triangular and square lattices can be made.

Synchronization of nanomechanical oscillators

A passive electro-mechanical device that reduces phase noise in oscillators, thereby improving their frequency precision. The noise reduction device can consist of a pair of coupled nonlinear resonators that are driven parametrically&#x2014;by modulating their natural frequency in time, through the output signal of a conventional oscillator at a frequency close to the sum of the linear mode frequencies. Above the threshold for parametric response, the coupled resonators can exhibit oscillation at an inherent frequency. The novel possibility for noise elimination is realized by tuning the system to operating points for which this periodic signal is immune to frequency noise in the drive signal, providing a way to clean the phase noise of the driving oscillator.

Passive phase noise cancellation element

A parametric feedback oscillator includes a resonator which has at least one transduction element and at least one electromechanical resonating element. The resonator is configured to accept as input a parametric excitation signal at a frequencyand to provide a resonating output signal at a frequency &#x3c9;. A cascaded feedback path in any electrically coupled cascade order includes at least one non-linear element, at least one phase shifter electrically, and at least one amplifier. The cascade feedback path is configured to receive as input the resonating output signal at a frequency &#x3c9;and configured to provide as output a feedback path signal as the parametric excitation signal at a frequencyto the resonator. A parametric feedback oscillator output terminal is configured to provide the resonating output signal at the frequency &#x3c9;as an output signal. A method of causing a parametric feedback oscillation is also described.

Parametric feedback oscillators

A system, device, method, and apparatus provide the ability to wire a voltage sensitive device to a nanoelectromechanical system (NEMS) resonator. A voltage sensitive device is configured to detect one or more voltage signals and output one or more electrical potentials in real-time. An array of piezoelectric NEMS resonators (with each resonator tuned to a unique frequency) is used to receive the output electrical potentials and convert each output electrical potential to a corresponding resonance frequency varying signal. The output signal from each resonator varies in linear proportion to the resonator's corresponding frequency variation arising from the applied electrical potential. The frequency varying signals are multiplexed together into a single readout signal path that is monitored to determine variations in vibrational amplitude. A demodulation device deconvolves the multiplexed frequency varying signals to recover and uniquely identify the output electrical signal.

Wiring nanoscale sensors with nanomechanical resonators

NEMS (Nano-Electro-Mechanical Systems) apparatuses are described. By applying a static electric field, an arm or beam in a NEMS apparatus is made to bend so that one electrical conductor is made to contact another electrical conductor, thereby closing the NEMS apparatus. Some apparatus embodiments make use of electrostatic coupling to cause the arm or beam to bend, and some apparatus embodiments make use of piezoelectric materials to cause the arm or beam to bend. Other embodiments are described and claimed.

Nano-electro-mechanical systems switches

A nanoelectromechanical systems (NEMS) device and method for using the device provide for a movable member that includes a region of low conductivity over which an electric field is developed. A region width is within a factor of ten (10) of a thickness of the NEMS device. The region is formed between a junction that incorporates piezoelectric material. A first voltage is applied across the region which alters a width of an active portion of the region thereby adjusting a movement of the movable member induced by a second voltage. The second voltage is applied across the region to produce a strain on the active portion of the region. The strain results in a defined movement of the movable member.

Highly efficient, charge depletion-mediated, voltage-tunable actuation efficiency and resonance frequency of piezoelectric semiconductor nanoelectromechanical systems resonators

Growing community of inventors

North Hills, CA, United States of America

Rassul Bulatovich Karabalin