Lucent Technologies Inc.

Triquint Technology Holding Co.

Ranjani C Muthiah

Gustav Edward Derkits, Jr

David Gerald Coult

Padman Parayanthal

Franklin Roy Dietz

William R Heffner

Patrick J Carroll

Sonja Radelow

A novel contact structure and method for a multilayer gettering contact metallization is provided utilizing a thin layer of a pure metal as the initial layer formed on a semiconductor cap layer. During formation of the contact structure, this thin metal layer reacts with the cap layer and the resulting reacted layer traps mobile impurities and self-interstitials diffusing within the cap layer and in nearby metal layers, preventing further migration into active areas of the semiconductor device. The contact metallization is formed of pure metal layers compatible with each other and with the underlying semiconductor cap layer such that depth of reaction is minimized and controllable by the thickness of the metal layers applied. Thin semiconductor cap layers, such as InGaAs cap layers less than 200 nm thick, may be used in the present invention with extremely thin pure metal layers of thickness 10 nm or less, thus enabling an increased level of integration for semiconductor optoelectronic devices. In addition, because pure metal layers are used in the ohmic contact, fewer impurities are introduced in the formation of the contact than with prior art alloy contacts.

Method of forming a laser circuit having low penetration ohmic contact providing impurity gettering and the resultant laser circuit

A method of calibrating an interferometer system and a multilayer thin film used for calibrating the interferometer system. The method including measuring the step height of a gold step with the interferometer system, the multilayer thin film comprising a gold layer that defines the gold step. The multilayer thin film having an optical flat, a first layer on the surface of the optical flat, a second layer on the first layer, a test layer on a part of the second layer, and a gold layer on the test layer and on a part of the second layer uncovered by the test layer. The test layer having a test layer step, and the gold layer having a gold step over the test layer step. Also, a reference standard and a method of making the reference standard for a thin film sample with one or more component thin film layers, the reference standard having a gold layer over the surface of the thin film sample.

Method of thin film process control and calibration standard for optical profilometry step height measurement

Growing community of inventors

Allentown, PA, United States of America

Ranjani C Muthiah