Freescale Semiconductor,inc.

Motorola Corporation

Clariant Finance (bvi) Limited

Randy D Redd

Lawrence Scott Klingbeil

Ralph R Dammel

Charles E Weitzel

Olin L Hartin

Mark A Spak

Ellen Y Lan

Hsin-Hua P Li

John P Sagan

Paul A Fisher

In one embodiment of the invention, a semiconductor component includes a semiconductor substrate (), a first dielectric layer () above the semiconductor substrate, a first ohmic contact region () and a second ohmic contact region () above the semiconductor substrate, a gate electrode () above the semiconductor substrate and between the first ohmic contact region and the second ohmic contact region, a field plate () above the first dielectric layer and between the gate electrode and the second ohmic contact region, a second dielectric layer () above the field plate, the first dielectric layer, the first ohmic contact region, and the second ohmic contact region, and a third dielectric layer () between the gate electrode and the field plate and not located above the gate electrode or the field plate.

Method of manufacturing a semiconductor component that includes self-aligning a gate electrode to a field plate

An etch stop layer ( ) is formed over a semiconductor substrate ( ). An epitaxial layer ( ) is formed overlying the etch stop layer ( ). The combination of the epitaxial layer ( ), etch stop layer ( ), and semiconductor substrate ( ) form a composite substrate ( ). The composite substrate ( ) is processed to fabricate a semiconductor device ( ) over the epitaxial layer ( ). Then the composite substrate ( ) is mounted to a wafer carrier ( ) to expose the semiconductor substrate ( ) and the semiconductor substrate ( ) is removed to substantially define a semiconductor device substrate ( ) that comprises the epitaxial layer ( ).

Method for forming a semiconductor device

A method for patterning a substrate having a surface with high aspect ratio topography with a photoresist is described. Specifically the surface of a semiconductor substrate is pre-wetted with a solvent solution to form a liquid solvent film. An additional amount of the solvent solution is added to form a solvent puddle on the liquid solvent film. Photoresist is dispensed onto the solvent puddle for a sufficient time and in a sufficient amount to allow diffusion of the photoresist and the solvent puddle into the openings defined in the topography of the substrate. The solvent solution in and on the surface of the openings defined in the substrate from the pre-wetting step is replaced with the photoresist by facilitating diffusion of the photoresist into the topography openings. A photoresist layer is then cast in a predetermined thickness on the surface of the substrate.

Method for patterning a substrate with photoresist

The present invention relates to a process for providing a pattern on a substrate for use in a metal lift-off process, the process comprising: 1) coating a substrate with a liquid positive photoresist; 2) soft baking the coated substrate; 3) contacting the substrate with an aqueous alkaline developer containing from about 0.005 volume percent to about 0.05 volume percent of an alkylene glycol alkyl ether; 4) placing a patterned mask over the substrate; 5) exposing the substrate through the mask; 6) post exposure baking the substrate; 7) optionally, flood exposing the substrate; and 8) developing the substrate with an aqueous alkaline developer. The invention also relates to a novel developer solution of an ammonium hydroxide containing from about 0.005 volume percent to about 0.5 volume percent of an alkylene glycol alkyl ether and to a process for producing such a novel developer solution.

Lift-off process for patterning fine metal lines

Growing community of inventors

Chandler, AZ, United States of America

Randy D Redd