Forschungszentrum Julich Gmbh

Other

R&uuml;diger Arens-Fischer

Michael Gotz Berger

Hans L&uuml;th

Markus Th&ouml;nissen

Michael Kr&uuml;ger

Michel Marso

Walter Lang

Dirk Hunkel

Wolfgang Theiss

Stefan Hilbrich

An optical silicon-based detector with a porous filter layer that has a laterally modifiable filter effect, comprising a plurality of integrated photosensitive cells. The invention also relates to a method for the production of an optical detector by creating an insulating layer on the porous filter layer and by providing active filter surfaces.

Optical detector with a filter layer made of porous silicon and method for the production thereof

An interference filter having a layer with an area consisting of a porous material extending from the surface of the layer to the interior, the dimensions of the porous layer area in a direction normal to the layer surface have different values to provide for varying reflection or, respectively, transmission characteristics.

Method for the production of a porous layer

A porous layer produced from silicon, germanium or aluminum by applying a wedge-shaped mask to the surface of the layer and by controlled elecrochemical etching along the mask.

Process for producing a porous layer by an electrochemical etching process

Growing community of inventors

Aachen, Germany

Rüdiger Arens-Fischer

Growing community of inventors

Aachen, Germany

R&uuml;diger Arens-Fischer

Rüdiger Arens-Fischer