Alis Corporation

Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Micrion Corporation

Randall G Percival

Billy W Ward

John Anthony Notte, Iv

Louis S Farkas, Iii

Raymond Hill

Lars Markwort

Dirk Aderhold

Ulrich Mantz

Klaus Edinger

Alexander Groholski

Richard A Comunale

John A Notte

Colin Sanford

Mark D DiManna

Michael Steigerwald

Shawn McVey

Johannes Bihr

Louise Smith Barriss

Lou Farkas

Alexander Grohloski

Russell Mello

Milton Rahman

John A Notte Iv

John A Iv Notte

Louis S Farkas Iii

Ion sources, systems and methods are disclosed.

Ion sources, systems and methods

In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.

Systems and methods for a gas field ionization source

Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.

Charged particle source with light monitoring for tip temperature determination

Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1&#xd7;10Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.

Gas delivery system with voltage gradient for an ion microscope

Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.

Increasing current in charged particle sources and systems

In one aspect the invention provides a gas field ion microscope that includes an ion source in connection with an optical column, such that an ion beam generated at the ion source travels through the optical column and impinges on a sample. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the invention provides methods for using the ion microscope to analyze samples and enhancing the performance of a gas field ion source.

Systems and methods for a gas field ion microscope

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Raymond, NH, United States of America

Randall G Percival