Intel Corporation

Randal Appleton

John Heck

Haisheng Rong

Sergei L Sochava

Israel Petronius

Hari Mahalingam

Harel Frish

Michael E Favaro

Joshua Keener

Stefan Meister

Ron Friedman

Wesley Harrison

Kenneth Johnson

Silicon photonic integrated circuit (PIC) on a multi-zone semiconductor on insulator (SOI) substrate having at least a first zone and a second zone. Various optical devices of the PIC may be located above certain substrate zones that are most suitable. A first length of a photonic waveguide structure comprises the crystalline silicon and is within the first zone, while a second length of the waveguide structure is within the second zone. Within a first zone, the crystalline silicon layer is spaced apart from an underlying substrate material by a first thickness of dielectric material. Within the second zone, the crystalline silicon layer is spaced apart from the underlying substrate material by a second thickness of the dielectric material.

Silicon photonic integrated circuits on substrates with structured insulators having specific thicknesses in separate zones

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Albuquerque, NM, United States of America

Randal Appleton