Alliedsignal Inc.

Sundstrand Data Control, Inc.

L-3 Communications Corporation

Sundstrand Corporation

Honeywell International Inc.

Other

Sundstrand Data Control Group

Rand H Hulsing, Ii

Rex B Peters

Kurt E Steinke

Randy Sprague

Charles K Lee

Brian L Norling

Steven A Foote

James R Woodruff

Mitchell J Novack

Fred V Holdren

John A Morrow

The present invention provides an apparatus and method for measuring the angular rotation of a moving body. The apparatus comprises an upper sensor layer, a lower handle layer substantially parallel to the sensor layer, at least one dither frame formed of the upper sensor layer, the frame having a dither axis disposed substantially parallel to the upper sensor layer and the lower handle layer. The apparatus further comprises a first accelerometer formed of the upper sensor layer and having a first force sensing axis perpendicular to the dither axis for producing a first output signal indicative of the acceleration of the moving body along the first force sensing axis, the first accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis. The apparatus also comprises a second accelerometer formed of the upper sensor layer and having a second force sensing axis perpendicular to the dither axis for producing a second output signal indicative of the acceleration of the moving body along the second force sensing axis, the second accelerometer having a proof mass and at least one flexure connecting the proof mass to the dither frame such that the proof mass can be electrically rotated perpendicular to the dither axis. The dither frame and proof masses have electrodes on an insulating layer for operating the first and second accelerometers and the upper sensor layer has a rate axis perpendicular to each of the first and second force sensing axes and the dither axis, whereby the first and second output signals have a Coriolis component indicative of the angular rotation of the moving body about the rate axis.

Closed loop analog gyro rate sensor

A triaxial sensor substrate is adapted for use in measuring the acceleration and angular rate of a moving body along three orthogonal axes. The triaxial sensor substrate includes three individual sensors that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. Each sensor is formed from two accelerometers having their sensing axes canted at an angle with respect to the plane of the substrate and further being directed in opposite directions. The rate sensing axes thus lie along three orthogonal axes. In order to reduce or eliminate angular acceleration sensitivity, a two substrate configuration may be used. Each substrate includes three accelerometers that are arranged in the plane of the substrate at an angle of 120 degrees with respect to one another. The sensing axes of the accelerometers of the first substrate are canted at an angle with respect to the plane of the first substrate toward the central portion thereof so that they lie along three skewed axes. Similarly, the sensing axes of the accelerometers of the second substrate are canted at an angle with respect to the plane of the second substrate away from the central portion thereof so that they lie along same three but oppositely directed axes. The sensing axes of the first and second substrates are aligned to prevent angular acceleration sensitivity.

Triaxial angular rate and acceleration sensor

Performance-enhancing, reduced-area metalization adhesion areas in force-sensing transducers are described.

Force-sensing transducers, accelerometers, rate sensors, methods of forming force-sensing transducers, and methods of forming vibrating-beam force transducers

Low metalization creep sensor

An apparatus and method for determining the rate of angular rotation of a moving body and, in particular, for alignment of the dither motion and the Coriolis acceleration sensing direction in a sensor adapted to be formed, i.e. micromachined, from a silicon substrate.

Axis alignment method

A symmetrical link device for linking first and second coplanar devices each movably mounted in a frame such that when one of the first and second coplanar devices is moved, a substantially equal and opposite motion is imparted to the other of the first and second coplanar devices.

Low vibration link

An apparatus for measuring the specific force and angular rotation rate of a moving body having multiple micromachined force-rebalance accelerometers formed in a layer of epitaxial material. The apparatus further includes a frame formed of the epitaxial material; two accelerometers, flexibly connected to the frame, which are also formed of the epitaxial material and each having a force sensing axis perpendicular to the vibration axis for producing an output signal indicative of the acceleration of the moving body along the force sensing axis; an electrical circuit imparting a dithering motion to the two accelerometers along the vibration axis; and a rate axis perpendicular to the force sensing axes and the vibration axis, whereby the output signals have a Coriolis component indicative of the angular rotation of the moving body about the rate axis.

Epitaxial coriolis rate sensor

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Redmond, WA, United States of America

Rand H Hulsing, Ii