Koninklijke Philips Corporation N.v.

Asml Netherlands B.v.

Rambus Inc.

Carl Zeiss Smt Gmbh

Philips Lighting Holding B.v.

Signify Holding B.v.

Koninklijke Philips Electronics N.v.

Philips Intellectual Property & Standards Gmbh

Ramon Pascal Van Gorkom

Michel Cornelis Josephus Marie Vissenberg

Marcellinus Petrus Carolus Michael Krijn

Peter Alexander Duine

Hugo Johan Cornelissen

Siebe Tjerk De Zwart

Willem Lubertus Ijzerman

Christoph Gerard August Hoelen

Rifat Ata Mustafa Hikmet

Tim Dekker

Dirk Hente

Marinus Johannes Maria Van Dam

Erik Roelof Loopstra

Vadim Yevgenyevich Banine

Johannes Petrus Maria Ansems

Oscar Hendrikus Willemsen

Anthonie Hendrik Bergman

Bertrand Johan Edward Hontele

Joseph Hendrik Anna Maria Jacobs

Joris Jan Vrehen

Gosse Charles De Vries

Mark Johannes Antonius Verhoeven

Petrus Johannes Bremer

Lingli Wang

Peter Johannes Martinus Bukkems

Pieter Willem Herman De Jager

Martin Jacobus Johan Jak

Franciscus Johannes Joseph Janssen

Jan Bernard Plechelmus Van Schoot

Martinus Petrus Joseph Peeters

Martin Endres

Sven Antoin Johan Hol

Fetze Pijlman

Rene Theodorus Wegh

Teunis Willem Tukker

Andrey Alexandrovich Nikipelov

Han-Kwang Nienhuys

Coen Theodorus Hubertus Fransiscus Liedenbaum

Ludovicus Johannes Lambertus Haenen

Edwin Johan Buis

René Theodorus Wegh

Olav Waldemar Vladimir Frijns

Gerbrand Van Der Zouw

Michael Jozef Mathijs Renkens

Matthijs Hendrik Keuper

Borgert Kruizinga

Hako Botma

Martijn Henri Richard Lankhorst

Denis Joseph Carel Van Oers

Wouter Joep Engelen

Marcellinus P C M Krijn

Huib Cooijmans

Marco Van As

Cornelis Adrianus Henricus Antonius Mutsaers

Robert Cornelis Houtepen

Andreas Aloysius Henricus Duijmelink

Volker Schoellmann

Elena Tiziana Ferrari

Willem Piet Van Hoof

Johannes Andreas Henricus Maria Jacobs

Rilpho Ludovicus Donker

Jan Van Schoot

Ruediger Johannes Lange

Marinus Josephus Jakobus Dona

Erik Maria Rekkers

Leonardus Adrianus Gerardus Grimminck

Marinus J J Dona

Marcus Jozef Van Bommel

Michel Cornelis Josephus Vissenberg

Chantal Sweegers

Nicolas Gerardus Antonius Peeters

Michel C J M Vissenberg

Cornelius Antonius Van Den Heuvel

Petrus Rutgerus Bartraij

Andelko Katalenic

René Jan Hendriks

Arij Jonathan Rijke

Johannus Gerardus Van Beek

Jörg Meyer

Jacob Sonneveld

Monica Antonia Maria De Wilt

Richard Josephus Arnoldus Maria Foederer

Siebe Tjerk De Zwark

Lucas Johannes Peter Ament

Martinus P J Peeters

Christoph G A Hoelen

Matthijs H Keuper

Denis J C Van Oers

Sven Hol

Marinus Van Dam

Petrus Bartraij

Leonardus Grimminck

Lucas Ament

Franciscus Janssen

Olav Frijns

Michael Renkens

Pieter De Jager

Martin J J Jak

Disclosed is a wavelength selection module for a metrology apparatus. The wavelength selection module comprises one or more filter elements being operable to receive an input radiation beam comprising multiple wavelengths to provide selective control of a wavelength characteristic of a corresponding output radiation beam. At least one of said one or more filter elements comprises at least two linear variable filters.

Wavelength selection module, illumination system and metrology system

An illumination intensity correction device can specify an illumination intensity over an illumination field of a lithographic projection exposure apparatus. The correction device has a plurality of rod-shaped individual stops arranged next to one another. A displacement drive can displace at least some of the individual stops at least along their respective rod axis. Free ends of the individual stops are individually displaceable using the displacement drive into a specified displacement position to specify an intensity correction of an illumination of the illumination field. The intensity correction acts along a correction dimension transverse with respect to the rod axes.

Illumination intensity correction device for specifying an illumination intensity over an illumination field of a lithographic projection exposure apparatus

A delivery system for use within a lithographic system. The beam delivery system comprises optical elements arranged to receive a radiation beam from a radiation source and to reflect portions of radiation along one or more directions to form a one or more branch radiation beams for provision to one or more tools.

Beam delivery apparatus and method

A power supplying device is provided for providing electrical power to a power receiving device, the power supplying device comprising two plates, two electrode structures being arranged to be coupled to an AC power source and at least one power transmitter. Each electrode structure is attached to one of said two plates. The power transmitter is situated in between the two plates and comprises an electrically conductive coil and at least two electrical contacts coupled to the electrically conductive coil. The plates and the power transmitter are arranged such that the power transmitter is movable in a direction parallel to the surfaces of the plates with the electrical contacts in contact with the respective two electrode structures for obtaining power from the AC power source.

Inductive power supply system

An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices

The invention relates to a network of luminaires for an automatic lighting system comprising at least two luminaires () and at least one controller, each luminaire comprising a light source () and at least two communication ports (), wherein the communication ports have predetermined configuration and orientation (), each communication port () is adapted to be communicatively connected to a communication port of another luminaire () in said network in the direction and orientation of the port (), and wherein the identification of unused communication ports () is communicated to said at least one controller. The invention further relates to a plug () adapted to be inserted into unused communication ports () in a luminaire of a network of luminaires (), said plug () being adapted to indicate to a controller () in said network that the communication port () is unused for communication to another luminaire; and to a method of auto-commissioning of a network of luminaires, wherein the method comprises the steps of: identifying unused communication ports (), communicating identified unused ports to said at least one controller, and control at least one luminaire as a function of the received information related to unused communication ports.

Auto commissioning and energy saving lighting system

The invention relates to an illumination module () comprising a plurality of light sources () distributed over a light guiding plate () accommodating said light sources and capable of guiding light of said light sources through at least a portion of said plate. The light guiding plate has one or more out-coupling structures (), preferably arranged around each light source, so that at least a portion of the light emitted by a first light source (A) and at least a portion of the light emitted by a second adjacent light source (B) mix within said light guiding plate before leaving said illumination module as a single substantially collimated mixed light beam. The invention further relates to a lamp and a display apparatus comprising such an illumination module.

Illumination module

The invention relates to a daylight illumination apparatus. A daylight collector () collects daylight (), which is guided to an illumination location to be illuminated along an optical path by a light guide (), wherein the daylight is absorbed by the light guide. A photoluminescent material () is arranged within the optical path and emits photoluminescent light that compensates for the absorption of the daylight by the light guide. Absorption losses of the daylight can therefore effectively be compensated, without necessarily needing, for example, an active compensation light source. This allows providing compensated daylight illumination in a technically relatively simple way.

Daylight illumination apparatus

A lighting system comprises a plurality of discrete light emitting diode modules and a translucent portion containing the plurality of discrete light emitting diode modules. Each light emitting diode module comprises a light emitting diode and at least a first module electrode and a second module electrode. The first module electrode is in electrical connection with the cathode of the light emitting diode and the second module electrode is in electrical connection with the anode of the light emitting diode. At least a portion of the plurality of light emitting diode modules form a string of modules, with at least one module electrode of each of the light emitting diode modules in the string being in direct physical contact with a module electrode of a neighboring light emitting diode module in the string such that, when a voltage is applied across the string, current flows in each light emitting diode module in the string thereby activating the light emitting diode of each light emitting diode module in the string.

Lighting system

The invention relates to a light-output device () controllable to provide different light-output functions. The light-output device comprises a light-source arrangement () configured to emit light; and a light-guiding system () arranged to receive the light and configured to guide the light to at least one light-output surface of the light-guiding system. The light-guiding system () comprises at least a first light-guide () and a second light-guide (); and the light-guiding system () is movable relative to the light-source arrangement () between at least a first position where light output by the light-source arrangement is guided by the first light-guide () to provide a first light-output function, and a second position where light output by the light-source arrangement is guided by the second light-guide () to provide a second light-output function, different from the first light-output function. The present invention is based on the realization that different light-output functions conveniently and intuitively can be achieved by moving a light-guiding system comprising at least two light-guides relative to a stationary light-source arrangement. Hereby, different light-output functions can be achieved with a single stationary light-source arrangement.

Light output device with movable lightguide system

A luminaire comprising lamellae holding means, a light source, and a set of lamellae comprising a plurality of (inclined) lamellae. The set of lamellae extends at least partially over a light emission window. The lamellae have a reflective front surface facing towards the light source, said front surface being designed to partially reflect light to the exterior and partially transmit light, for example in that the lamellae are diffusely translucent or have a perforated surface. The set of lamellae is provided with light converging means, for example a Fresnel lens, which optionally are integrated in the lamellae to prevent the luminaire becoming too bulky.

Luminaire having a set of lamellae

A power supplying device () is provided for providing electrical power to a power receiving device (), the power supplying device () comprising two plates (), two electrode structures () being arranged to be coupled to an AC power source () and at least one power transmitter (). Each electrode structure () is attached to one of said two plates (). The power transmitter () is situated in between the two plates () and comprises an electrically conductive coil () and at least two electrical contacts () coupled to the electrically conductive coil (). The plates () and the power transmitter () are arranged such that the power transmitter () is movable in a direction parallel to the surfaces of the plates () with the electrical contacts () in contact with the respective two electrode structures () for obtaining power from the AC power source ().

The invention provides a multi-beam illumination system () for providing an illumination image (). The multi-beam illumination system () has a plurality of light sources () with optional collimating optics (), arranged to generate a plurality of light beams (); a panel () comprising a plurality of panel segments () in a panel plane () at a first distance (d) and arranged to contain a plurality of segment patterns () on the corresponding panel segments (); and an imaging lens array () comprising a plurality of imaging lenses () in an imaging lens plane () parallel to the panel plane (). Each imaging lens () of the imaging lens array () is arranged to image a corresponding segment pattern () of the plurality of segment patterns () into a respective projection image () of a plurality of projection images (). The plurality of projection images () overlap at a predetermined image distance (Lp) and form the illumination image ().

Multi-beam illumination system and method of illumination

An electronic system comprises at least a base part, a power source and at least one electronic module adapted to be powered by the power source. The base part is provided with at least two parallel extending, elongated tracks being electrically conductive. At least one parameter of the electronic module is changeable by amending the distance of the electronic module to a predetermined location on the tracks.

Electronic system and an electronic module therefor

This invention relates to a light emitting device () having a movable collimating unit for adjusting the output direction of light being emitted from the light emitting device. The light emitting device comprises a base unit (), and a light output unit () which is engaged with the base unit. The light output unit comprises at least one light source () for emitting light. The light emitting device further comprises a movably arranged collimating unit () for adjusting the direction of the emitted light, which is arranged such that it encompasses a light output portion (), which is arranged on the light output unit.

Light emitting device and luminaire

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Veldhoven, Netherlands

Ramon Pascal Van Gorkom