Jenoptik Ldt Gmbh

Cms Mikrosystene Gmbh Chemnitz

Ramon Hahn

Thomas Gessner

Christian Kaufmann

Jan Mehner

Wolfram Doetzel

Joachim Markert

Manfred Rauch

Heinz-Ulrich Lowe

Steffen Kurt

Wolfram Dotzel

Udo Wollmann

A resonance scanner, wherein a frame (), a drive plate (), a mirror () and torsion springs () form an actuator part (), said drive plate () being attached within the frame () by two first torsion springs () such that the drive plate () can oscillate about a common first axis of torsion () of both torsion springs (), said mirror () being attached within the drive plate () by two second torsion springs () such that the mirror () can oscillate about a common second axis of torsion () of both torsion springs (), and said first axis of torsion () and said second axis of torsion () being parallel to each other; wherein, further, only the frame () of the actuator part () is attached to side walls () of a box-shaped stator part (), a drive means (stator electrodesor coil) is arranged at a bottom () of the stator part () only in the region of the geometrical surface area of the drive plate () and said bottom () has a recess () in the region of the geometrical surface area of the mirror (), which recess () is dimensioned at least such that a maximum mechanical deflection of the mirror () is not limited by the bottom (), said drive means (stator electrodesor coil) applying a force only directly to the drive plate () and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (), which differs from the eigenfrequency of the drive plate ().

Resonance scanner

Micro swivel actuators and a procedure for the production of the same

Growing community of inventors

Chemnitz, Germany

Ramon Hahn