Asml Netherlands B.v.

Ramo Omerovic

Ferdy Migchelbrink

Zhuangxiong Huang

Franciscus Johannes Leonardus Heutz

José Nilton Fonseca Junior

Emericus Antoon Theodorus Van Den Akker

Henricus Anita Jozef Wilhelmus Van De Ven

The present invention provides a fluid purging system () for an optical element (), comprising a fluid guiding unit arranged to guide a fluid, provided by a fluid supply system, over at least a curved portion of an optical surface () of the optical element. The fluid guiding unit comprises a fluid inlet and a first nozzle unit () for providing a fluid to the optical surface. The fluid guiding unit being formed by at least a first wall portion () and at least a second wall portion (), wherein the second wall portion being configured to face the optical surface and to follow a contour of the optical surface. The second wall portion comprises a second nozzle unit ().

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Heerlen, Netherlands

Ramo Omerovic