Lucent Technologies Inc.

Ramaswamy Srinivasa Raghavan

Edwin Arthur Chandross

Yaw S Obeng

Robert L Opila

A method of solvating metal ions in an aromatic organic liquid. The method includes adding an ammonium salt having an organic acid reagent to the aromatic organic liquid. The organic acid reagent comprises a carboxylate having eight (8) or less carbon atoms. Thereafter, an aqueous solution comprising a metal salt is added to the aromatic organic liquid comprising the ammonium salt and the organic acid reagent. As a result, at least 10% by weight of metal ions is solvated in the aromatic organic liquid.

Compositions comprising a solvated metal

Method of solvating a metal in an aromatic organic liquid

The present invention provides a method for removing contaminant metals from a solvent used in the manufacture of a semiconductor wafer. The method may comprise the steps of bringing a solvent having contaminant metals therein into contact with a sacrificial body having titanium oxide associated therewith and cleaning the semiconductor wafer with the solvent. The titanium oxide reacts with the contaminant metals to substantially remove them from the solvent to provide a substantially cleaner solvent for the production of metal oxide semiconductor (MOS)devices. The present invention is particularly applicable in 'back-end' processes of such devices.

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Berkeley Heights, NJ, United States of America

Ramaswamy Srinivasa Raghavan