Saint-gobain Abrasives, Inc.

Saint-gobain Abrasifs

Saint-gobain Ceramics & Plastics, Inc.

Ramanujam Vedantham

Srinivasan Ramanath

Taewook Hwang

Rachana Upadhyay

Brahmanandam V Tanikella

Robert A Rizzuto

Matthew A Simpson

Cecile O Mejean

Jianhui Wu

Palaniappan Chinnakaruppan

Isaac K Cherian

Linda S Bateman

Eric M Schulz

Thomas Puthanangady

John M Gulcius

Charles Dinh-Ngoc

Maureen A Brosnan

Signo T Reis

John S Hagan

Shivshankar Sivasubramanian

Alexandre Temperelli

Gilles Querel

Kelley McNeal

Andrew L Biro

Lisa A Johnson

An abrasive article can include a body including a bond material, abrasive particles, and a plurality of pores, wherein the bond material can comprise a vitreous material. In one embodiment, an average particle size of the abrasive particles can be between 0.1 microns to 5 microns, and a porosity of the body may be between 40 vol % to 70 vol %, wherein the porosity may define an average pore size (D50) of at least 0.1 microns and not greater than 5 microns.

Bonded abrasive article and method of making the same

An abrasive article including a body having a bond material comprising an inorganic material, abrasive particles contained within the bond materials; and pores contained within the bond material defining a porosity of at least 90 vol % and not greater than 97 vol % for a total volume of the body.

Abrasive articles and method of forming same

A bonded abrasive article suitable for processing hard materials such as sapphire. In an embodiment, an abrasive article includes a bonded abrasive body including a bond material comprising a metal, abrasive particles contained within the bond material having an average particle size of not greater than about 20 &#x3bc;m, and a pore size standard deviation of not greater than about 16 &#x3bc;m. An abrasive article can also include a bonded abrasive body having a bond material comprising metal, abrasive particles contained within the bond material having an average particle size of not greater than about 20 &#x3bc;m, and an average pore size of not greater than about 110 &#x3bc;m.

Abrasive article and method of forming

An abrasive article includes a body having an annular surface including abrasive segments coupled to the annular surface, and the abrasive segments define an abrasive annular region and a percent abrasive surface area of not greater than 24% for the total surface area of the abrasive annular region.

Abrasive article and method of use

A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 &#x3bc;m/cm, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Sapphire substrate

An abrasive article including a bonded abrasive body having a bond material made of a vitrified material, abrasive particles comprising a first type of superabrasive material contained in the bond material, a porosity of at least about 50 vol % of the total volume of the bonded abrasive body, and a &#x394;CTE of not greater than about 5.5 ppm/&#xb0; C., wherein &#x394;CTE is defined as a difference between a CTE of the bond material and a CTE of the abrasive particles.

A superabrasive resin product includes a superabrasive grain component, an oxide component, and a continuous phase defining a network of interconnected pores. The oxide component consists of an oxide of a lanthanoid, and the continuous phase includes a thermoplastic polymer component. The superabrasive grain component and the oxide component are distributed in the continuous phase.

Resin bonded abrasive

An abrasive tool including a CMP pad conditioner having a substrate including a first major surface, a second major surface opposite the first major surface, and a side surface extending between the first major surface and the second major, wherein a first layer of abrasive grains is attached to the first major surface and a second layer of abrasive grains is attached to the second major surface. The conditioner further includes a first sealing member extending in a peripheral direction along a portion of the side surface of the substrate.

Abrasive tool for use as a chemical mechanical planarization pad conditioner

An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.

Corrosion-resistant CMP conditioning tools and methods for making and using same

A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 &#x3bc;m in diameter. Seventy percent of the pores are in a range of between about 40 &#x3bc;m and about 500 &#x3bc;m and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product.

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Worcester, MA, United States of America

Ramanujam Vedantham