Electro Scientific Industries, Inc.

Raman Sudhakar

Ho Wai Lo

Spencer Barrett

Donald R Wilt

Corey M Dunsky

Ken Whiteman

A single pass actuator ( ), such as a deformable mirror ( ), quickly changes, preferably in less than 1 ms, the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output ( ) at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers ( ) at higher fluences and underlying dielectric layers ( ) at lower fluences to protect bottom metallic layers ( ). The focus change is accomplished without requiring Z-axis movement of the laser positioning system ( ). In addition, the spot size can be changed advantageously during trepanning operations to decrease via taper, reduce lip formation, increase throughput, and/or minimize damage.

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Beaverton, OR, United States of America

Raman Sudhakar