Uchicago Argonne, LLC

University of California

University of Missouri

Brookhaven Science Associates, Lcc

Ralu Divan

Philip D Laible

Martyna Michalska

Anirudha V Sumant

Igor Paprotny

Raymond P Conley

Lara A Gundel

Igor S Aronson

Albert Macrander

Nathalie C D Bouet

Andrey Sokolov

Chrystian M Posada

Carlos H Castano

Edwin J Grant

Hyoung K Lee

M Tanim Humayun

Philippe Noirot

A material with nanopillar structures extending from a substrate. The nanopillars are engageable by organisms to cause an interaction, such as cellular destruction.

Tunable nanotextured materials

A material with a nanotexture comprising structures extending from a substrate. The structures are modified by coating the nanotexture with a protective coating and partially removing the coating, exposing a portion of the structure for functionalization.

Localized functionalization of nanotextured surfaces

A method of manufacturing a functionalized pre-treated carbon nanotube. Atomic Layer deposition is utilized to functionalize a pre-treated carbon nanotube. The functionalized pre-treated carbon nanotube may be used in a chemiresistor, including for methane detection.

Pre-treated functionalized multi-walled carbon nanotube based methane sensor

A source cold cathode field emission array (FEA) source based on ultra-nanocrystalline diamond (UNCD) field emitters. This system was constructed as an alternative for detection of obscured objects and material. Depending on the geometry of the given situation a flat-panel source can be used in tomography, radiography, or tomosynthesis. Furthermore, the unit can be used as a portable electron or X-ray scanner or an integral part of an existing detection system. UNCD field emitters show great field emission output and can be deposited over large areas as the case with carbon nanotube 'forest' (CNT) cathodes. Furthermore, UNCDs have better mechanical and thermal properties as compared to CNT tips which further extend the lifetime of UNCD based FEA.

Method to fabricate portable electron source based on nitrogen incorporated ultrananocrystalline diamond (N-UNCD)

A process is disclosed for sectioning by etching of monolayers and multilayers using an RIE technique with fluorine-based chemistry. In one embodiment, the process uses Reactive Ion Etching (RIE) alone or in combination with Inductively Coupled Plasma (ICP) using fluorine-based chemistry alone and using sufficient power to provide high ion energy to increase the etching rate and to obtain deeper anisotropic etching. In a second embodiment, a process is provided for sectioning of WSi/Si multilayers using RIE in combination with ICP using a combination of fluorine-based and chlorine-based chemistries and using RF power and ICP power. According to the second embodiment, a high level of vertical anisotropy is achieved by a ratio of three gases; namely, CHF, Cl, and Owith RF and ICP. Additionally, in conjunction with the second embodiment, a passivation layer can be formed on the surface of the multilayer which aids in anisotropic profile generation.

Technique for etching monolayer and multilayer materials

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Darien, IL, United States of America

Ralu Divan