International Business Machines Corporation

Ralph Trollinger

Stanley Robert Jordan

Gary Leon Stewart

An apparatus for producing laminated integrated circuit cubes includes a hermetically sealable oven chamber. At least one conductive heating device is used to heat the cube to a cure temperature. A vacuum source is connected to the oven chamber to remove gas from between the integrated circuit layers prior to curing. A press device applies pressure to the cube while it is heated under vacuum. A cooling gas is circulated through the oven chamber after curing. A cooling fluid can also be circulated through cooling channels in at least one wall of the oven chamber to cool the chamber.

Apparatus for making laminated integrated circuit devices

A method for producing laminated integrated circuit cubes includes applying conductive heat to the cube using at least one conductive heating device. A vacuum is created around the cube to remove air and other gases from between the integrated circuit layers prior to curing. A force is applied to the cube while it is heated under vacuum. A cooling gas is then circulated over the cube. Temperature and force sensing can be performed, and the process can be controlled by programmable logic controllers and the like.

Method for making laminated integrated circuit devices

An oven for making laminated integrated circuit cubes includes an oven chamber with at least one access opening. A closure member for the access opening is capable of hermetically sealing the chamber. A hermetic connection is provided for supplying power to within the chamber. Structure permits the withdrawal of air and other gases from within the chamber. Hermetic structure permits the application of a press force to a workpiece within the chamber from an actuator outside the chamber. Hermetic temperature sensing devices measure the temperature of a workpiece within the chamber.

Vacuum oven chamber for making laminated integrated circuit devices

An apparatus for applying a force to laminated integrated circuit cubes in an oven chamber includes a force-applying member, an actuator for the force-applying member, and sealing structure for sealing the force-applying member to an opening permitting access by said force-applying member into the oven chamber. The sealing structure has a flexible sleeve, and the force-applying member passes through the sleeve. A first end of the sleeve is hermetically sealed to the force-applying member, and a second end of the sleeve can be hermetically sealed about the opening. The force applying member can move within the opening and the flexible sleeve will flex with this movement.

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Pompano Beach, FL, United States of America

Ralph Trollinger