Sensirion Ag

Ralph Steiner Vanha

Markus Graf

Lukas Bürgi

Ulrich Bartsch

Stephan Braun

Zeljko Mrcarica

René Hummel

Samuel Fuhrer

Christoph Schanz

Johannes Bühler

Tommasso Francesco Cilento

Marcel Pluess

Thomas Brugger

Tommaso Francesco Cliento

Lukas Steinmann

Stefan Wengle

Marc Stämpfli

Matthias Böller

Zhenhua Wang

A sensor module comprises a master sensor unit for sensing a first environmental parameter, a slave sensor unit for sensing a second environmental parameter, a common substrate on which the master sensor unit and the slave sensor unit are mounted, and a digital bus interface for a communication between the master sensor unit and the slave sensor unit. The master sensor unit comprises a non-volatile memory for storing calibration data and configuration data of the master sensor unit and the slave sensor unit. The master sensor unit is embodied as a first chip, and the slave sensor unit is embodied as a second chip. Such sensor module is compact, robust and versatile.

Sensor module

A sensor integrated on a semiconductor device (), in particular a flow sensor, comprises a measuring element () on a membrane (). In order to prevent a buckling of the membrane () a tensile coating () is applied. The coating covers the membrane, but it preferably leaves all the active electronic components integrated on the semiconductor chip () uncovered, such that their electrical properties are not affected.

Micromechanical flow sensor with tensile coating

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Zurich, Switzerland

Ralph Steiner Vanha